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TWO-DIMENSIONAL MATERIALS

Monolayer transistors at wafer scales

Nature Electronics volume 4, pages 868–869 (2021)Cite this article

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Monolayer transition metal dichalcogenide transistors can be fabricated on 300 mm wafers using an approach that is compatible with back-end-of-line process temperatures.

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Fig. 1: 2D monolayer transistors at wafer scales.

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Authors and Affiliations

  1. Frontier Institute of Chip and System, Fudan University, Shanghai, China

    Du Xiang

  2. Institute of Optoelectronics, Fudan University, Shanghai, China

    Tao Liu

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  1. Du Xiang
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  2. Tao Liu
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Correspondence to Du Xiang or Tao Liu.

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Xiang, D., Liu, T. Monolayer transistors at wafer scales. Nat Electron 4, 868–869 (2021). https://doi.org/10.1038/s41928-021-00694-7

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