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METROLOGY

Multiscale 3D X-ray imaging

Nature Electronics volume 2, pages 435–436 (2019)Cite this article

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A technique known as ptychographic X-ray laminography can image integrated circuits over large volumes and with a resolution of around 10 nm.

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Fig. 1: Imaging integrated circuits with PyXL.

References

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  1. Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, MD, USA

    R. Joseph Kline

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  1. R. Joseph Kline
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Correspondence to R. Joseph Kline.

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Kline, R.J. Multiscale 3D X-ray imaging. Nat Electron 2, 435–436 (2019). https://doi.org/10.1038/s41928-019-0320-4

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