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MEMS

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Microelectromechanical systems (MEMS) – which combine microelectronics with micromachining technologies –are typically transducer systems which have the ability to sense or control physical, optical or chemical quantities. In the past decades, MEMS have attracted research attention driven by their exploitation in a variety of applications including automotive, biomedical, electronic, and communication. Such systems are nowadays paramount for producing a number of devices that are largely used in our daily life such as airbag sensors, optical switches, etc; the interest in MEMS for biological/medical applications (BioMEMS) is also growing rapidly with opportunities in a number of areas such as biosensors, pacemakers, and drug delivery.

This Collection brings together original research in the topic of MEMS, looking at their design, fabrication as well as their use in medicine, engineering, and natural sciences applications.

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Macro Shot of a Silicon Wafer during Semiconductor and Computer Chip Manufacturing at Fab or Foundry. Semicondutor Wafer Texture.

Editors

Mahmoud Almasri is currently an Associate Professor with the Department of Electrical and Computer Engineering, University of Missouri, Columbia, MO. His current research includes fiberoptic based sensors and impedance-based biosensors, power harvesters, uncooled infrared material and detectors. Prof. Almasri has been an Editorial Board Member for Scientific Reports since 2023.

 

 

Kazunori Hoshino is an Associate Professor at University of Connecticut. His research interests are related to nano/micro-electro-mechanical systems (NEMS/MEMS) based sensing and imaging. He focuses on light microscopy-based mechanical analysis of in vitro tissue models. Prof. Hoshino has been an Editorial Board Member for Scientific Reports since 2019.

 

 

Meiyong Liao is a Chief Researcher at National Institute for Materials Science (NIMS), Japan. His current research interests cover diamond growth, MEMS, and semiconductor electronic and photonic devices. Dr. Liao has been an Editorial Board Member for Scientific Reports since 2014.