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MEMS

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Microelectromechanical systems (MEMS) – which combine microelectronics with micromachining technologies –are typically transducer systems which have the ability to sense or control physical, optical or chemical quantities. In the past decades, MEMS have attracted research attention driven by their exploitation in a variety of applications including automotive, biomedical, electronic, and communication. Such systems are nowadays paramount for producing a number of devices that are largely used in our daily life such as airbag sensors, optical switches, etc; the interest in MEMS for biological/medical applications (BioMEMS) is also growing rapidly with opportunities in a number of areas such as biosensors, pacemakers, and drug delivery.

This Collection brings together original research in the topic of MEMS, looking at their design, fabrication as well as their use in medicine, engineering, and natural sciences applications.

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Macro Shot of a Silicon Wafer during Semiconductor and Computer Chip Manufacturing at Fab or Foundry. Semicondutor Wafer Texture.

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Collections articles undergo Scientific Reports' standard peer review process and are subject to all of the journal’s standard policies. This includes the journal’s policy on competing interests. The Guest Editors have no competing interests with the submissions which they handle through the peer review process. The peer review of any submissions for which the Guest Editors have competing interests is handled by another Editorial Board Member who has no competing interests.

This Collection has not been supported by sponsorship.