MEMS

3D piezoelectric microsystems pop up

The compressive buckling of lithographically defined, two-dimensional patterns can create three-dimensional piezoelectric microsystems with a range of potential applications.

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Fig. 1: 3D piezoelectric microsystems and their potential applications.

adapted from ref. 8, Springer Nature Ltd

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Correspondence to Michael C. McAlpine.

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Haghiashtiani, G., McAlpine, M.C. 3D piezoelectric microsystems pop up. Nat Electron 2, 15–16 (2019). https://doi.org/10.1038/s41928-018-0196-8

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