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3D piezoelectric microsystems pop up

The compressive buckling of lithographically defined, two-dimensional patterns can create three-dimensional piezoelectric microsystems with a range of potential applications.

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Fig. 1: 3D piezoelectric microsystems and their potential applications.

adapted from ref. 8, Springer Nature Ltd

References

  1. Voss, R. et al. In 9th Int. Conf. Solid-State Sensors Actuators (Transducers '97) 2, 879–882 (1997).

  2. Yu, X. et al. Nat. Biomed. Eng. 2, 165–172 (2018).

    Article  Google Scholar 

  3. Damaraju, S. M. et al. Biomaterials 149, 51–62 (2017).

    Article  Google Scholar 

  4. Yu, Q. et al. AIP Adv. 5, 047144 (2015).

    Article  Google Scholar 

  5. Zhao, N. et al. Rev. Sci. Instrum. 87, 015003 (2016).

    Article  Google Scholar 

  6. Tsukamoto, T., Umino, Y., Shiomi, S., Yamada, K. & Suzuki, T. Sci. Technol. Adv. Mater. 19, 660–668 (2018).

    Article  Google Scholar 

  7. Qi, Y. et al. Nano Lett. 11, 1331–1336 (2011).

    Article  Google Scholar 

  8. Han, M. et al. Nat. Electron. https://doi.org/10.1038/s41928-018-0189-7 (2019).

  9. Rakotondrabe, M., Ivan, I. A., Khadraoui, S., Lutz, P. & Chaillet, N. IEEE/ASME Trans. Mechatronics 20, 519–531 (2015).

    Article  Google Scholar 

  10. Lee, S. et al. Sci. Rep. 8, 301 (2018).

    Article  Google Scholar 

Download references

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Correspondence to Michael C. McAlpine.

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Haghiashtiani, G., McAlpine, M.C. 3D piezoelectric microsystems pop up. Nat Electron 2, 15–16 (2019). https://doi.org/10.1038/s41928-018-0196-8

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