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Ion implantation

Naturevolume 256pages701705 (1975) | Download Citation



Ion implantation has proved an elegant and successful technique, and in the manufacture of silicon devices, is now being extended both for research and practical applications in other materials, such as metals.

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  1. 1

    Lindhard, J., Scharff, M., and Schiøtt, H. E., Kgl. Danske Vid. Selsk., Matt.-Fys. Medd., 33, no. 14 (1963).

  2. 2

    Dearnaley, G., Freeman, J. H., Nelson, R. S., and Stephen, J., Ion Implantation, Ch. 2 (North-Holland, Amsterdam, 1973).

  3. 3

    Allen, R. M., Proc. European Conf. on Ion Implantation, 127 (Peter Peregrinus, Stevenage, 1970).

  4. 4

    Seidel, T. F., Meek, R. L., and Cullis, A. G., Proc. Int. Conf. on Lattice Defects in Semiconductors (Institute of Physics, London, in the press).

  5. 5

    Sigmon, T. W., and Swanson, R., Sol. State Electronics, 16, 1217 (1973).

  6. 6

    Amelio, G. F., Proc. Conf. on Charge-coupled Devices (University of Edinburgh Press, Edinburgh, 1974).

  7. 7

    Woodcock, J. M., Shannon, J. M., and Clark, D. J., Sol. State Electronics, 18, 267 (1975).

  8. 8

    Freeman, J. H., et al., Proc. Int. Conf. on Ion Implantation in Semiconductors and Other Materials, Osaka 1974 (in the press).

  9. 9

    Dearnaley, G., Proc. Conf. on Applications of Ion Beams to Metals, 63 (Plenum Press, New York, 1974).

  10. 10

    Hartley, N. E. W., Tribology, 65 (April 1975).

  11. 11

    Antill, J. E., Bennett, M. J., Dearnaley, G., Fern, F., Goode, P. D., and Turner, J. F., Proc. Conf. on Ion Implantation in Semiconductors and Other Materials, 415 (Plenum, New York, 1974).

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  1. Atomic Energy Research Establishment, Harwell, Oxfordshire, OX11 0RA, UK

    • G. Dearnaley


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