MEMS SENSORS

Distortion-free probes of electric field

A microfabricated silicon device can locally measure the intensity of an electric field without any significant field distortion.

Access options

Rent or Buy article

Get time limited or full article access on ReadCube.

from$8.99

All prices are NET prices.

Fig. 1: MEMS sensors for measuring electric field strength.

References

  1. 1.

    Llovera, P. et al. J. Electrost. 67, 457–461 (2009).

    Article  Google Scholar 

  2. 2.

    Aranguren, D. et al. J. Electrost. 67, 507–512 (2009).

    Article  Google Scholar 

  3. 3.

    Miller, C. J. IEEE Trans. Power Appar. Syst. PAS-86, 493–498 (1967).

    Article  Google Scholar 

  4. 4.

    Miles, R. et al. Report on Non-Contact DC Electric Field Sensors Report LLNL-TR-414129 (Lawrence Livermore National Laboratory, 2009).

  5. 5.

    Horenstein, M. N. & Stone, P. R. J. Electrost. 51–52, 515–521 (2001).

    Article  Google Scholar 

  6. 6.

    Chen, T. et al. Sens. Actuators A 245, 76–84 (2016).

    Article  Google Scholar 

  7. 7.

    Xue, F. et al. IEEE Trans. Ind. Electron. 62, 5730–5737 (2015).

    Article  Google Scholar 

  8. 8.

    Kainz, A. et al. Nat. Electron. https://doi.org/10.1038/s41928-017-0009-5 (2018).

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Vittorio Ferrari.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Ferrari, V. Distortion-free probes of electric field. Nat Electron 1, 10–11 (2018). https://doi.org/10.1038/s41928-017-0013-9

Download citation