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Nanofabrication meets open science

Sharing the step-by-step procedures necessary to fabricate nanostructures could optimize efforts to achieve reproducible devices.

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Fig. 1: Tacit knowledge in nanofabrication process development.

References

  1. 1.

    Norte, R. A. Nanofabrication for On-Chip Optical Levitation, Atom-Trapping, and Superconducting Quantum Circuits. PhD thesis, California Institute of Technology (2015).

  2. 2.

    Stanford Nanofabrication Facility. https://snfexfab.stanford.edu/snf/projects-processes/processes

  3. 3.

    Birck Nanotechnology Center. https://www.purdue.edu/discoverypark/birck/

  4. 4.

    Bereyhi, M. https://nanofab-net.org/media/Al2O3_LPCVD_pinhole.pdf

  5. 5.

    Zenodo. http://zenodo.org

  6. 6.

    BioProtocol. https://bio-protocol.org

  7. 7.

    SpringerProtocol. https://experiments.springernature.com/

  8. 8.

    OpenWetWare. https://openwetware.org

  9. 9.

    https://www.comsol.ch/model/optical-ring-resonator-notch-filter-22221

  10. 10.

    Liu, J. et al. Nat. Photonics 14, 486–491 (2020).

    CAS  Article  Google Scholar 

  11. 11.

    Pfeiffer, M. H. P. Photonic Damascene Process for Integrated High Q Microresonator Based Nonlinear Photonic Devices. PhD thesis, EPFL (2018).

  12. 12.

    Beccari, A., Engelsen, N. J., Fedorov, S., Bereyhi, M. & Kippenberg, T. Bull. Am. Phys. Soc. https://meetings.aps.org/Meeting/MAR21/Session/P27.9 (2021).

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Acknowledgements

This work was supported by funding from the EPFL Open Science Fund.

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Correspondence to Mohammad J. Bereyhi.

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Bereyhi, M.J., Kippenberg, T.J. Nanofabrication meets open science. Nat. Nanotechnol. 16, 850–852 (2021). https://doi.org/10.1038/s41565-021-00944-x

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