Nanoelectronics

The strain of it all

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Electron interferometry can be used to measure strain with nanoscale resolution in electronic devices by exploiting a simple idea found in physics textbooks.

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Figure 1: In the standard moiré technique (top left) the samples (A and B) are placed on top of each other and the interference fringes are recorded.

References

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    Patorski, K. & Kujawinska, M. Handbook of the Moiré Fringe Technique (Elsevier, Amsterdam, 1993).

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    Möllenstedt, G. & Düker, H. Z. für Physik A 145, 377–397 (1956).

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    Treacy, M. M. J. & Gibson, J. M. J. Vac. Sci. Technol. B 4, 1458–1466 (1986).

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