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Finer features for functional microdevices

Micromachines can be created with higher resolution using two-photon absorption.

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Figure 1: Microfabrication and nanofabrication at subdiffraction-limit resolution.
Figure 2: Functional micro-oscillator system, in which not only the spring but also the cubic anchor and the bead were produced using our two-photon absorption system.


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Correspondence to Satoshi Kawata.

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Kawata, S., Sun, HB., Tanaka, T. et al. Finer features for functional microdevices. Nature 412, 697–698 (2001).

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