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Epitaxial synthesis of diamond by carbon-ion deposition at low energy

Abstract

THIN epitaxial layers have been grown in vacuum by the controlled deposition of low-energy carbon ions on to heated single crystal diamond substrates by a process described here. Reproducible crystalline growth, up to 10 µm in thickness and up to several mm2 in area, has been observed on both natural stones and polished diamond plaques1. Three competing forms of ion-deposited carbon have also been characterised.

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FREEMAN, J., TEMPLE, W. & GARD, G. Epitaxial synthesis of diamond by carbon-ion deposition at low energy. Nature 275, 634–635 (1978). https://doi.org/10.1038/275634a0

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  • DOI: https://doi.org/10.1038/275634a0

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