Letter | Published:

Production of Superconducting Niobium Films by Vacuum-Arc Deposition

Naturevolume 193pages766767 (1962) | Download Citation



HOLLAND1 commented that certain workers2,3 interested in the production of vacuum-deposited thin films had shown that the electric arc could be used for this purpose. He noted that this method offered a possible solution to the problem of evaporating low-vapour-pressure metals which for various reasons could not be handled by the techniques then available. We have shown that, where films of uniform thickness are not required, the high deposition-rates obtainable from a vacuum-arc at a very short distance from the substrate greatly facilitate the production of pure films in poor vacua.

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  1. 1

    Holland, L., Nature, 178, 328 (1956).

  2. 2

    Hiesinger, L., German Patent No. 915765 (July 29, 1954).

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    Vodar, B., Minn, S., and Offret, S., J. Phys. Rad., 16, 811 (1955).

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    Marchand, J. F., and Venema, A., Philips Res. Rep., 14, 427 (1959).

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    Lucas, M. S. P., Owen, H. A., Stewart, W. C., and Vail, C. R., Rev. Sci. Instr., 32, 203 (1961).

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    Lucas, M. S. P., Vail, C. R., Stewart, W. C., Owen, H. A., Vacuum Symposium Transactions, Eighth Nat. Symp. (Pergamon Press) (in the press).

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    Cook, D. B., Zemansky, M. W., and Boorse, H. A., Phys. Rev., 80, 737 (1950).

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  1. Superconducting Circuits Laboratory, Electrical Engineering Department, Duke University, Durham, North Carolina

    • M. S. P. LUCAS
    •  & D. T. MEYER


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