Atom probe tomography (APT) provides three-dimensional compositional mapping with sub-nanometre resolution. The sensitivity of APT is in the range of parts per million for all elements, including light elements such as hydrogen, carbon or lithium, enabling unique insights into the composition of performance-enhancing or lifetime-limiting microstructural features and making APT ideally suited to complement electron-based or X-ray-based microscopies and spectroscopies. Here, we provide an introductory overview of APT ranging from its inception as an evolution of field ion microscopy to the most recent developments in specimen preparation, including for nanomaterials. We touch on data reconstruction, analysis and various applications, including in the geosciences and the burgeoning biological sciences. We review the underpinnings of APT performance and discuss both strengths and limitations of APT, including how the community can improve on current shortcomings. Finally, we look forwards to true atomic-scale tomography with the ability to measure the isotopic identity and spatial coordinates of every atom in an ever wider range of materials through new specimen preparation routes, novel laser pulsing and detector technologies, and full interoperability with complementary microscopy techniques.
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De Geuser, F. & Gault, B. Metrology of small particles and solute clusters by atom probe tomography. Acta Mater. 188, 406–415 (2020).
Müller, E. W., Panitz, J. A., McLane, S. B. & Müller, E. W. Atom-probe field ion microscope. Rev. Sci. Instrum. 39, 83–86 (1968).
Muller, E. W. Oberflachenwanderung von Wolfram auf dem eigenen Kristallgitter [German]. Z. Fur Phys. 126, 642–665 (1949).
Müller, E. W. & Bahadur, K. Field ionization of gases at a metal surface and the resolution of the field ion microscope. Phys. Rev. 102, 624–631 (1956).
Müller, E. W. Experiments of the theory of electron emission under the influence of high field strength. Phys. Z. 37, 838–842 (1936).
Durand, E. Electrostatique Et Magnétostatique [French] (Masson & Cie, Libraires De L’académie De Médecine, 1953).
Smith, R. & Walls, J. M. Ion trajectories in field-ion microscope. J. Phys. D-Applied Phys. 11, 409–419 (1978).
Müller, E. W. Atoms visualized. Sci. Am. 196, 113–122 (1957).
Müller, E. W. Atom-probe field ion microscope. Naturwissenschaften 57, 222–230 (1970).
Panitz, J. A. The 10 cm atom probe. Rev. Sci. Instrum. 44, 1034 (1973).
Waugh, A. R., Boyes, E. D. & Southon, M. J. Field-desorption microscopy and the atom probe. Nature 253, 342–343 (1975).
Cerezo, A., Godfrey, T. J. & Smith, G. D. W. Application of a position-sensitive detector to atom probe microanalysis. Rev. Sci. Instrum. 59, 862 (1988).
Blavette, D., Bostel, A., Sarrau, J. M., Deconihout, B. & Menand, A. An atom probe for three-dimensional tomography. Nature 363, 432–435 (1993).
Kelly, T. F. & Miller, M. K. Invited review article: Atom probe tomography. Rev. Sci. Instrum. 78, 31101 (2007). This article is a thorough introductory review article on APT, with an emphasis on its historical developments.
Miller, M. K. The development of atom probe field-ion microscopy. Mater. Charact. 44, 11–27 (2000).
Cadel, E., Fraczkiewicz, A. & Blavette, D. Atomic scale observation of Cottrell atmospheres in B-doped FeAl (B2) by 3D atom probe field ion microscopy. Mater. Sci. Engin. A 309, 32–37 (2001).
Wilde, J., Cerezo, A. & Smith, G. D. W. Three-dimensional atomic-scale mapping of a Cottrell atmosphere around a dislocation in iron. Scr. Mater. 43, 39–48 (2000).
Herbig, M. et al. Atomic-scale quantification of grain boundary segregation in nanocrystalline material. Phys. Rev. Lett. 112, 126103 (2014).
Liebscher, C. H. et al. Strain-induced asymmetric line segregation at faceted Si grain boundaries. Phys. Rev. Lett. 121, 15702 (2018).
Gault, B. et al. Interfaces and defect composition at the near-atomic scale through atom probe tomography investigations. J. Mater. Res. 33, 4018–4030 (2018).
Ringer, S. P. & Apperley, M. H. Networking strategies of the microscopy community for improved utilisation of advanced instruments: (1) The Australian Microscopy and Microanalysis Research Facility (AMMRF). Comptes Rendus Phys. 15, 269–275 (2014).
Larson, D. J. Local Electrode Atom Probe Tomography: A User’s Guide (Springer, 2013).
Lefebvre-Ulrikson, W., Vurpillot, F. & Sauvage, X. Atom Probe Tomography: Put Theory into Practice (Academic, 2016).
Kelly, T. F. et al. First data from a commercial local electrode atom probe (LEAP). Microsc. Microanal. 10, 373–383 (2004).
Nishikawa, O., Ohtani, Y., Maeda, K., Watanabe, M. & Tanaka, K. Development of the scanning atom probe and atomic level analysis. Mater. Charact. 44, 29–57 (2000).
Grennan-Heaven, N., Cerezo, A., Godfrey, T. J. J. & Smith, G. D. W. Design of a scanning atom probe with improved mass resolution using post deceleration. Ultramicroscopy 107, 59–60 (2006).
Kelly, T. F., Camus, P. P., Larson, D. J., Holzman, L. M. & Bajikar, S. S. On the many advantages of local-electrode atom probes. Ultramicroscopy 62, 29–42 (1996).
Ravelo, B. & Vurpillot, F. Analysis of excitation pulsed signal propagation for atom probe tomography system. Prog. Electromagn. Res. Lett. 47, 61–70 (2014).
Kellogg, G. L. & Tsong, T. T. Pulsed-laser atom-probe field-ion microscopy. J. Appl. Phys. 51, 1184 (1980).
Cerezo, A., Grovenor, C. R. M. & Smith, G. D. W. Pulsed laser atom probe analysis of semiconductor materials. J. Microscopy 141, 155–170 (1986).
Gault, B. et al. Design of a femtosecond laser assisted tomographic atom probe. Rev. Sci. Instrum. 77, 43705 (2006).
Bunton, J. H., Olson, J. D., Lenz, D. R. & Kelly, T. F. Advances in pulsed-laser atom probe: instrument and specimen design for optimum performance. Microsc. Microanal. 13, 418–427 (2007).
Schlesiger, R. et al. Design of a laser-assisted tomographic atom probe at Munster University. Rev. Sci. Instrum. 81, 43703 (2010).
Houard, J., Vella, A., Vurpillot, F. & Deconihout, B. Conditions to cancel the laser polarization dependence of a subwavelength tip. Appl. Phys. Lett. 94, 121905 (2009).
Koelling, S. et al. In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography. J. Appl. Phys. 109, 104909 (2011).
Poschenrieder, W. P. Multiple-focusing time of flight mass spectrometers. Part I. TOFMS with equal momentum acceleration. Int. J. Mass. Spectrom. Ion. Phys. 6, 413–426 (1971).
Bostel, A. & Yavor, M. Patent Application Publication Pub. No.: US 2010/0223698 A1 (2010).
Mamyrin, B. A., Karataev, V. I., Shmikk, D. V. & Zagulin, V. A. Mass-reflectron a new nonmagnetic time-of-flight high-resolution mass-spectrometer. Zhurnal Eksp. I Teor. Fiz. 64, 82–89 (1973).
Bemont, E. et al. Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe. Ultramicroscopy 95, 231–238 (2003).
Panayi, P. A reflectron for use in a three-dimensional atom probe. Great Britain Patent No. GB2426120A (2006).
Clifton, P., Gribb, T., Gerstl, S., Ulfig, R. M. & Larson, D. J. Performances advantages of a modern, ultra-high mass resolution atom probe. Microsc. Microanal. 14, 454–455 (2008).
Deconihout, B., Gerard, P., Bouet, M. & Bostel, A. Improvement of the detection efficiency of channel plate electron multiplier for atom probe application. Appl. Surf. Sci. 94–5, 422–427 (1996).
Jagutzki, O. et al. Multiple hit readout of a microchannel plate detector with a three-layer delay-line anode. IEEE Trans. Nucl. Sci. 49, 2477–2483 (2002).
Da Costa, G., Vurpillot, F., Bostel, A., Bouet, M. & Deconihout, B. Design of a delay-line position-sensitive detector with improved performance. Rev. Sci. Instrum. 76, 13304 (2005).
Brandon, D. G. On field evaporation. Philos. Mag. 14, 803–820 (1966).
Waugh, A. R., Boyes, E. D. & Southon, M. J. Investigations of field evaporation with field desorption microscope. Surf. Sci. 61, 109–142 (1976).
Wada, M. On the thermally activated field evaporation of surface atoms. Surf. Sci. 145, 451–465 (1984).
Menand, A. & Kingham, D. R. Evidence for the quantum mechanical tunnelling of boron ions. J. Phys. C Solid. State Phys. 18, 4539–4547 (1985).
Kingham, D. R. The post-ionization of field evaporated ions: a theoretical explanation of multiple charge states. Surf. Sci. 116, 273–301 (1982).
Kellogg, G. L. Determining the field emitter temperature during laser irradiation in the pulsed laser atom probe. J. Appl. Phys. 52, 5320 (1981).
Kellogg, G. L. Measurement of the charge state distribution of field evaporated ions: evidence for post-ionization. Surf. Sci. 120, 319–333 (1982).
Marquis, E. A. & Gault, B. Determination of the tip temperature in laser assisted atom-probe tomography using charge state distributions. J. Appl. Phys. 104, 84914 (2008).
Shariq, A. et al. Investigations of field-evaporated end forms in voltage- and laser-pulsed atom probe tomography. Ultramicroscopy 109, 472–479 (2009).
Katnagallu, S. et al. Impact of local electrostatic field rearrangement on field ionization. J. Phys. D Appl. Phys. 51, 105601 (2018).
Zhu, M. et al. Unique bond breaking in crystalline phase change materials and the quest for metavalent bonding. Adv. Mater. 30, 1706735 (2018).
Yu, Y., Cagnoni, M., Cojocaru-Mirédin, O. & Wuttig, M. Chalcogenide thermoelectrics empowered by an unconventional bonding mechanism. Adv. Funct. Mater. 30, 1904862 (2020).
Yao, L., Gault, B., Cairney, J. M. & Ringer, S. P. On the multiplicity of field evaporation events in atom probe: a new dimension to the analysis of mass spectra. Philos. Mag. Lett. 90, 121–129 (2010).
Saxey, D. W. Correlated ion analysis and the interpretation of atom probe mass spectra. Ultramicroscopy 111, 473–479 (2011).
Peng, Z. et al. Unraveling the metastability of Cn2+ (n = 2–4) clusters. J. Phys. Chem. Lett. 10, 581–588 (2019).
Sha, W. et al. Some aspects of atom-probe analysis of Fe–C and Fe–N systems. Surf. Sci. 266, 416–423 (1992).
Silaeva, E. P. et al. Do dielectric nanostructures turn metallic in high-electric DC fields? Nano Lett. 14, 6066–6072 (2014).
Karahka, M. & Kreuzer, H. J. Field evaporation of oxides: a theoretical study. Ultramicroscopy 132, 54–59 (2013).
Kellogg, G. Field evaporation of silicon and field desorption of hydrogen from silicon surfaces. Phys. Rev. B 28, 1957–1964 (1983).
Müller, M., Saxey, D. W., Smith, G. D. W. & Gault, B. Some aspects of the field evaporation behaviour of GaSb. Ultramicroscopy 111, 487–492 (2011).
Zanuttini, D. et al. Simulation of field-induced molecular dissociation in atom-probe tomography: identification of a neutral emission channel. Phys. Rev. A 95, 61401 (2017).
Miller, M. K. An atom probe study of the anomalous field evaporation of alloys containing silicon. J. Vac. Sci. Technol. 19, 57 (1981).
Yao, L., Cairney, J. M., Zhu, C. & Ringer, S. P. Optimisation of specimen temperature and pulse fraction in atom probe microscopy experiments on a microalloyed steel. Ultramicroscopy 111, 648–651 (2011).
Mancini, L. et al. Composition of wide bandgap semiconductor materials and nanostructures measured by atom probe tomography and its dependence on the surface electric field. J. Phys. Chem. C. 118, 24136–24151 (2014).
Kolli, R. P. & Seidman, D. N. Comparison of compositional and morphological atom-probe tomography analyses for a multicomponent Fe–Cu steel. Microsc. Microanal. 13, 272–284 (2007).
Tang, F., Gault, B., Ringer, S. P. & Cairney, J. M. Optimization of pulsed laser atom probe (PLAP) for the analysis of nanocomposite Ti–Si–N films. Ultramicroscopy 110, 836–843 (2010).
Huang, M., Cerezo, A., Clifton, P. H. & Smith, G. D. W. Measurements of field enhancement introduced by a local electrode. Ultramicroscopy 89, 163–167 (2001).
Loi, S. T., Gault, B., Ringer, S. P., Larson, D. J. & Geiser, B. P. Electrostatic simulations of a local electrode atom probe: the dependence of tomographic reconstruction parameters on specimen and microscope geometry. Ultramicroscopy 132, 107–113 (2013).
Miller, M. K. & Smith, G. D. W. Atom Probe Microanalysis: Principles and Applications to Materials Problems (Materials Research Society, 1989).
Melmed, A. J. The art and science and other aspects of making sharp tips. J. Vac. Sci. Technol. B 9, 601–608 (1991).
Papazian, J. M. The preparation of field-ion-microscope specimens containing grain boundaries. J. Microsc. 94, 63–67 (1971).
Nordén, H. & Bowkett, K. M. Electron microscope holders for viewing thin wire specimens and field-ion microscope tips. J. Sci. Instrum. 44, 238–240 (1967).
Waugh, A. R., Payne, S., Worrall, G. M. & Smith, G. D. W. In-situ ion milling of field-ion specimens using a liquid-metal ion-source. J. Phys. 45, 207–209 (1984).
Thompson, K. et al. In situ site-specific specimen preparation for atom probe tomography. Ultramicroscopy 107, 131–139 (2007).
Thompson, K., Larson, D. J. & Ulfig, R. M. Pre-sharpened and flat-top microtip coupons: a quantitative comparison for atom-probe analysis studies. Microsc. Microanal. 11, 882–883 (2005).
Estivill, R., Audoit, G., Barnes, J.-P., Grenier, A. & Blavette, D. Preparation and analysis of atom probe tips by xenon focused ion beam milling. Microsc. Microanal. 22, 576–582 (2016).
Eder, K., Bhatia, V., Van Leer, B. & Cairney, J. M. Using a plasma fib equipped with Xe, N2, O2 and Ar for atom probe sample preparation—ion implantation and success rates. Microsc. Microanal. 25, 316–317 (2019).
Halpin, J. E. et al. An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focussed ion beam. Ultramicroscopy 202, 121–127 (2019).
Miller, M. K., Russell, K. F. & Thompson, G. B. Strategies for fabricating atom probe specimens with a dual beam FIB. Ultramicroscopy 102, 287–298 (2005).
Prosa, T. J. & Larson, D. J. Modern focused-ion-beam-based site-specific specimen preparation for atom probe tomography. Microsc. Microanal. 23, 194–209 (2017). This article reviews methods for specimen preparation primarily using the FIB.
Makineni, S. K. et al. Correlative microscopy — novel methods and their applications to explore 3D chemistry and structure of nanoscale lattice defects: a case study in superalloys. JOM 70, 1736–1743 (2018).
Herbig, M. Spatially correlated electron microscopy and atom probe tomography: current possibilities and future perspectives. Scr. Mater. 148, 98–105 (2018).
Felfer, P. J., Alam, T., Ringer, S. P. & Cairney, J. M. A reproducible method for damage-free site-specific preparation of atom probe tips from interfaces. Microsc. Res. Tech. 75, 484–491 (2012).
Herbig, M., Choi, P. & Raabe, D. Combining structural and chemical information at the nanometer scale by correlative transmission electron microscopy and atom probe tomography. Ultramicroscopy 153, 32–39 (2015).
Felfer, P. et al. New approaches to nanoparticle sample fabrication for atom probe tomography. Ultramicroscopy 159, 413–419 (2015).
Lovall, D., Buss, M., Andres, R. & Reifenberger, R. Resolving the atomic structure of supported nanometer-size Au clusters. Phys. Rev. B Condens. Matter Mater. Phys. 58, 15889–15896 (1998).
Li, T. et al. Atomic imaging of carbon-supported Pt, Pt/Co, and Ir@Pt nanocatalysts by atom-probe tomography. ACS Catal. 4, 695–702 (2014).
Tedsree, K. et al. Hydrogen production from formic acid decomposition at room temperature using a Ag–Pd core-shell nanocatalyst. Nat. Nanotechnol. 6, 302–307 (2011).
Yu, K. M. K. et al. Non-syngas direct steam reforming of methanol to hydrogen and carbon dioxide at low temperature. Nat. Commun. 3, 1230 (2012).
Eley, C. et al. Nanojunction-mediated photocatalytic enhancement in heterostructured CdS/ZnO, CdSe/ZnO, and CdTe/ZnO nanocrystals. Angew. Chem. Int. Ed. 126, 7972–7976 (2014).
Raghuwanshi, M., Cojocaru-Mirédin, O. & Wuttig, M. Investigating bond rupture in resonantly bonded solids by field evaporation of carbon nanotubes. Nano Lett. 20, 116–121 (2020).
Ene, C. B., Schmitz, G., Kirchheim, R. & Hütten, A. Stability and thermal reaction of GMR NiFe/Cu thin films. Acta Mater. 53, 3383–3393 (2005).
Stender, P., Balogh, Z. & Schmitz, G. Triple line diffusion in nanocrystalline Fe/Cr and its impact on thermal stability. Ultramicroscopy 111, 524–529 (2011).
Prosa, T., Kostrna Keeney, S. & Kelly, T. F. Local electrode atom probe analysis of poly(3-alkylthiophene)s. J. Microsc. 237, 155–167 (2010).
Gault, B. et al. Atom probe microscopy of self-assembled monolayers: preliminary results. Langmuir 26, 5291–5294 (2010).
Stoffers, A., Oberdorfer, C. & Schmitz, G. Controlled field evaporation of fluorinated self-assembled monolayers. Langmuir 28, 56–59 (2012).
Devaraj, A. et al. Visualizing nanoscale 3D compositional fluctuation of lithium in advanced lithium-ion battery cathodes. Nat. Commun. 6, 8014 (2015).
Diercks, D., Gorman, B. P., Cheung, C. L. & Wang, G. Techniques for consecutive TEM and atom probe tomography analysis of nanowires. Microsc. Microanal. 15, 254–255 (2009).
Xiang, Y. et al. Long-chain terminal alcohols through catalytic CO hydrogenation. J. Am. Chem. Soc. 135, 7114–7117 (2013).
Perea, D. E., Wijaya, E., Lensch-Falk, J. L., Hemesath, E. R. & Lauhon, L. J. Tomographic analysis of dilute impurities in semiconductor nanostructures. J. Solid. State Chem. 181, 1642–1649 (2008).
Du, S. et al. Full tip imaging in atom probe tomography. Ultramicroscopy 124, 96–101 (2013).
Yang, Q. et al. Atom probe tomography of Au–Cu bimetallic nanoparticles synthesized by inert gas condensation. J. Phys. Chem. C. 123, 26481–26489 (2019).
Yang, Q. et al. A combined approach for deposition and characterization of atomically engineered catalyst nanoparticles. Catal. Struct. React. 1, 125–131 (2015).
Barroo, C., Akey, A. J. & Bell, D. C. Aggregated nanoparticles: sample preparation and analysis by atom probe tomography. Ultramicroscopy 218, 113082 (2020).
Felfer, P., Benndorf, P., Masters, A., Maschmeyer, T. & Cairney, J. M. Revealing the distribution of the atoms within individual bimetallic catalyst nanoparticles. Angew. Chem. Int. Ed. 53, 11190–11193 (2014).
Raine, E. et al. Synthesis and characterization of platinum nanoparticle catalysts capped with isolated zinc species in SBA-15 cChannels: the wall effect. ACS Appl. Nano Mater. 1, 6603–6612 (2018).
Yu, B. et al. Enhanced propylene oxide selectivity for gas phase direct propylene epoxidation by lattice expansion of silver atoms on nickel nanoparticles. Appl. Catal. B Env. 243, 304–312 (2019).
Jiang, K. et al. Highly selective oxygen reduction to hydrogen peroxide on transition metal single atom coordination. Nat. Commun. 10, 3997 (2019).
Wang, Z. et al. Acidity enhancement through synergy of penta- and tetra-coordinated aluminum species in amorphous silica networks. Nat. Commun. 11, 225 (2020).
Wilde, P. et al. Insights into the formation, chemical stability, and activity of transient NiyP@NiOx core-shell heterostructures for the oxygen evolution reaction. ACS Appl. Energy Mater. 3, 2304–2309 (2020).
Larson, D. J. et al. Encapsulation method for atom probe tomography analysis of nanoparticles. Ultramicroscopy 159, 420–426 (2015).
Kim, S.-H. et al. A new method for mapping the three-dimensional atomic distribution within nanoparticles by atom probe tomography (APT). Ultramicroscopy 190, 30–38 (2018).
Kim, S.-H. et al. Direct imaging of dopant and impurity distributions in 2D MoS2. Adv. Mater. 32, 1907235 (2020).
Lim, J. et al. Atomic-scale mapping of impurities in partially reduced hollow TiO2 nanowires. Angew. Chem. Int. Ed. 59, 5651–5655 (2020).
Perea, D. E., Gerstl, S. S. A., Chin, J., Hirschi, B. & Evans, J. E. An environmental transfer hub for multimodal atom probe tomography. Adv. Struct. Chem. Imaging 3, 12 (2017).
Chen, Y.-S. et al. Direct observation of individual hydrogen atoms at trapping sites in a ferritic steel. Science 355, 1196–1199 (2017).
Stephenson, L. T. et al. The Laplace project: an integrated suite for correlative atom probe tomography and electron microscopy under cryogenic and UHV conditions. PLoS ONE 13, e0209211 (2018).
Chen, Y.-S. et al. Observation of hydrogen trapping at dislocations, grain boundaries, and precipitates. Science 367, 171–175 (2020).
Breen, A. J. et al. Solute hydrogen and deuterium observed at the near atomic scale in high-strength steel. Acta Mater. 188, 108–120 (2020).
Schwarz, T. M. et al. Field evaporation and atom probe tomography of pure water tips. Sci. Rep. 10, 20271 (2020). This article is a first thorough report on the analysis of thick layers of ice, liquid-metal interfaces and solutions.
El-Zoka, A. A. et al. Enabling near-atomic-scale analysis of frozen water. Sci. Adv. 6, eabd6324 (2020).
Perea, D. E. et al. Tomographic mapping of the nanoscale water-filled pore structure in corroded borosilicate glass. npj Mater. Degrad. 4, 1–7 (2020).
Chang, Y. et al. Ti and its alloys as examples of cryogenic focused ion beam milling of environmentally-sensitive materials. Nat. Commun. 10, 942 (2019).
Lilensten, L. & Gault, B. New approach for FIB-preparation of atom probe specimens for aluminum alloys. PLoS ONE 15, e0231179 (2020).
Rivas, N. A. et al. Cryo-focused ion beam preparation of perovskite based solar cells for atom probe tomography. PLoS ONE 15, e0227920 (2020).
Schreiber, D. K., Perea, D. E., Ryan, J. V., Evans, J. E. & Vienna, J. D. A method for site-specific and cryogenic specimen fabrication of liquid/solid interfaces for atom probe tomography. Ultramicroscopy 194, 89–99 (2018).
Sebastian, J. T., Hellman, O. C. & Seidman, D. N. New method for the calibration of three-dimensional atom-probe mass spectra. Rev. Sci. Instrum. 72, 2984–2988 (2001).
Hudson, D., Smith, G. D. W. & Gault, B. Optimisation of mass ranging for atom probe microanalysis and application to the corrosion processes in Zr alloys. Ultramicroscopy 111, 480–486 (2011).
Valley, J. W. et al. Hadean age for a post-magma-ocean zircon confirmed by atom-probe tomography. Nat. Geosci. 7, 219–223 (2014).
Lloyd, M. J. et al. Decoration of voids with rhenium and osmium transmutation products in neutron irradiated single crystal tungsten. Scr. Mater. 173, 96–100 (2019).
Edmondson, P. D., Gault, B. & Gilbert, M. R. An atom probe tomography and inventory calculation examination of second phase precipitates in neutron irradiated single crystal tungsten. Nucl. Fusion. 60, 126013 (2020).
London, A. J., Haley, D. & Moody, M. P. Single-Ion deconvolution of mass peak overlaps for atom probe microscopy. Microsc. Microanal. 23, 300–306 (2017).
Wilkes, T. J., Smith, G. D. W. & Smith, D. A. On the quantitative analysis of field ion micrographs. Metallography 7, 403–430 (1974).
Cerezo, A., Warren, P. J. & Smith, G. D. W. Some aspects of image projection in the field-ion microscope. Ultramicroscopy 79, 251–257 (1999).
De Geuser, F. & Gault, B. Reflections on the projection of ions in atom probe tomography. Microsc. Microanal. 23, 238–246 (2017).
Blavette, D., Sarrau, J. M., Bostel, A. & Gallot, J. Direction and depth of atom probe analysis. Rev. Phys. Appl. 17, 435–440 (1982).
Bas, P., Bostel, A., Deconihout, B. & Blavette, D. A general protocol for the reconstruction of 3D atom probe data. Appl. Surf. Sci. 87–88, 298–304 (1995).
Gault, B. et al. Advances in the reconstruction of atom probe tomography data. Ultramicroscopy 111, 448–457 (2011).
Jeske, T. & Schmitz, G. Nanoscale analysis of the early interreaction stages in Al/Ni. Scr. Mater. 45, 555–560 (2001).
Hellman, O. C., du Rivage, J. B. & Seidman, D. N. Efficient sampling for three-dimensional atom probe microscopy data. Ultramicroscopy 95, 199–205 (2003).
Oberdorfer, C., Eich, S. M. & Schmitz, G. A full-scale simulation approach for atom probe tomography. Ultramicroscopy 128, 55–67 (2013).
Wei, Y. et al. 3D nanostructural characterisation of grain boundaries in atom probe data utilising machine learning methods. PLoS ONE 14, e022504 (2019).
Camus, E. & Abromeit, C. Analysis of conventional and 3-dimensional atom-probe data for multiphase materials. J. Appl. Phys. 75, 2373–2382 (1994).
Moody, M. P., Stephenson, L. T., Liddicoat, P. V. & Ringer, S. P. Contingency table techniques for three dimensional atom probe tomography. Microsc. Res. Tech. 70, 258–268 (2007).
Moody, M. P., Stephenson, L. T., Ceguerra, A. V. & Ringer, S. P. Quantitative binomial distribution analyses of nanoscale like-solute atom clustering and segregation in atom probe tomography data. Microsc. Res. Tech. 71, 542–550 (2008).
Hellman, O. C., Vandenbroucke, J. A., Rüsing, J., Isheim, D. & Seidman, D. N. Analysis of three-dimensional atom-probe data by the proximity histogram. Microsc. Microanal. 6, 437–444 (2000).
Felfer, P. & Cairney, J. Advanced concentration analysis of atom probe tomography data: local proximity histograms and pseudo-2D concentration maps. Ultramicroscopy 189, 61–64 (2018).
Martin, T. L. et al. Insights into microstructural interfaces in aerospace alloys characterised by atom probe tomography. Mater. Sci. Technol. 32, 232–241 (2016).
Hellman, O. C. & Seidman, D. N. Measurement of the Gibbsian interfacial excess of solute at an interface of arbitrary geometry using three-dimensional atom probe microscopy. Mater. Sci. Eng. 327, 24–28 (2002).
Jenkins, B. M. et al. Reflections on the analysis of interfaces and grain boundaries by atom probe tomography. Microsc. Microanal. 26, 247–257 (2020).
Felfer, P., Scherrer, B., Demeulemeester, J., Vandervorst, W. & Cairney, J. M. Mapping interfacial excess in atom probe data. Ultramicroscopy 159, 438–444 (2015).
Peng, Z. et al. An automated computational approach for complete in-plane compositional interface analysis by atom probe tomography. Microsc. Microanal. 25, 389–400 (2019).
Yao, L., Ringer, S. P., Cairney, J. M. & Miller, M. K. The anatomy of grain boundaries: their structure and atomic-level solute distribution. Scr. Mater. 69, 622–625 (2013).
Araullo-Peters, V. J. et al. Atom probe crystallography: atomic-scale 3-D orientation mapping. Scr. Mater. 66, 907–910 (2012).
Stephenson, L. T., Moody, M. P., Liddicoat, P. V. & Ringer, S. P. New techniques for the analysis of fine-scaled clustering phenomena within atom probe tomography (APT) data. Microsc. Microanal. 13, 448–463 (2007).
Philippe, T. et al. Clustering and nearest neighbour distances in atom-probe tomography. Ultramicroscopy 109, 1304–1309 (2009).
Dumitraschkewitz, P., Gerstl, S. S. A., Stephenson, L. T., Uggowitzer, P. J. & Pogatscher, S. Clustering in age-hardenable aluminum alloys. Adv. Eng. Mater. 20, 1800255 (2018). This article reviews and compares cluster-finding techniques, therein applied to aluminium alloys.
De Geuser, F. & Lefebvre, W. Determination of matrix composition based on solute-solute nearest-neighbor distances in atom probe tomography. Microsc. Res. Tech. 74, 257–263 (2011).
Morsdorf, L., Emelina, E., Gault, B., Herbig, M. & Tasan, C. C. Carbon redistribution in quenched and tempered lath martensite. Acta Mater. 205, 116521 (2020).
Sudbrack, C., Noebe, R. & Seidman, D. Direct observations of nucleation in a nondilute multicomponent alloy. Phys. Rev. B 73, 212101 (2006).
Haley, D., Petersen, T., Barton, G. & Ringer, S. P. Influence of field evaporation on radial distribution functions in atom probe tomography. Philos. Mag. 89, 925–943 (2009).
De Geuser, F., Lefebvre, W. & Blavette, D. 3D atom probe study of solute atoms clustering during natural ageing and pre-ageing of an Al–Mg–Si alloy. Philos. Mag. Lett. 86, 227–234 (2006).
Hyde, J. M. & English, C. A. An analysis of the structure of irradiation induced Cu-enriched clusters in low and high nickel welds. Mater. Res. Soc. Symp. Proc. 650, R6.6 (2001).
Miller, M. K. & Kenik, E. A. Atom probe tomography: a technique for nanoscale characterization. Microsc. Microanal. 8, 1126–1127 (2002).
Vaumousse, D., Cerezo, A. & Warren, P. J. A procedure for quantification of precipitate microstructures from three-dimensional atom probe data. Ultramicroscopy 95, 215–221 (2003).
Marceau, R. K. W., Stephenson, L. T., Hutchinson, C. R. & Ringer, S. P. Quantitative atom probe analysis of nanostructure containing clusters and precipitates with multiple length scales. Ultramicroscopy 111, 738–742 (2011).
Karnesky, R. A., Sudbrack, C. K. & Seidman, D. N. Best-fit ellipsoids of atom-probe tomographic data to study coalescence of γ’ (L12) precipitates in Ni–Al–Cr. Scr. Mater. 57, 353–356 (2007).
Marquis, E. A. & Hyde, J. M. Applications of atom-probe tomography to the characterisation of solute behaviours. Mater. Sci. Eng. R. Rep. 69, 37–62 (2010).
Lefebvre, W. et al. 3DAP measurements of Al content in different types of precipitates in aluminium alloys. Surf. Interface Anal. 39, 206–212 (2007).
Ghamarian, I. & Marquis, E. A. Hierarchical density-based cluster analysis framework for atom probe tomography data. Ultramicroscopy 200, 28–38 (2019).
Zelenty, J., Dahl, A., Hyde, J., Smith, G. D. W. & Moody, M. P. Detecting clusters in atom probe data with Gaussian mixture models. Microsc. Microanal. 23, 269–278 (2017).
Felfer, P., Ceguerra, A. V., Ringer, S. P. & Cairney, J. M. Detecting and extracting clusters in atom probe data: a simple, automated method using Voronoi cells. Ultramicroscopy 150, 30–36 (2015).
Vincent, G. B., Proudian, A. P. & Zimmerman, J. D. Three dimensional cluster analysis for atom probe tomography using Ripley’s K-function and machine learning. Ultramicroscopy 220, 113151 (2021).
Marquis, E. A. et al. A round robin experiment: analysis of solute clustering from atom probe tomography data. Microsc. Microanal. 22, 666–667 (2016).
Katnagallu, S. et al. Imaging individual solute atoms at crystalline imperfections in metals. N. J. Phys. 21, 123020 (2019).
Hyde, J. M., Marquis, E. A., Wilford, K. B. & Williams, T. J. A sensitivity analysis of the maximum separation method for the characterisation of solute clusters. Ultramicroscopy 111, 440–447 (2011).
Williams, C. A. et al. Defining clusters in APT reconstructions of ODS steels. Ultramicroscopy 132, 271–278 (2013).
Cerezo, A. & Davin, L. Aspects of the observation of clusters in the 3-dimensional atom probe. Surf. Interface Anal. 39, 184–188 (2007).
Zhao, H., Gault, B., Ponge, D., Raabe, D. & De Geuser, F. Parameter free quantitative analysis of atom probe data by correlation functions: application to the precipitation in Al–Zn–Mg–Cu. Scr. Mater. 154, 106–110 (2018).
Gault, B., Moody, M. P., Cairney, J. M. & Ringer, P. S. Atom probe crystallography. Mater. Today 15, 378–386 (2012).
Vurpillot, F., De Geuser, F., Da Costa, G. & Blavette, D. Application of Fourier transform and autocorrelation to cluster identification in the three-dimensional atom probe. J. Microsc. 216, 234–240 (2004).
Yao, L. et al. Crystallographic structural analysis in atom probe microscopy via 3D Hough transformation. Ultramicroscopy 111, 458–463 (2011).
Araullo-Peters, V. J. et al. A new systematic framework for crystallographic analysis of atom probe data. Ultramicroscopy 154, 7–14 (2015).
Geiser, B. P. et al. Spatial distribution maps for atom probe tomography. Microsc. Microanal. 13, 437–447 (2007).
Boll, T., Al-Kassab, T., Yuan, Y. & Liu, Z. G. Investigation of the site occupation of atoms in pure and doped TiAl/Ti3Al intermetallic. Ultramicroscopy 107, 796–801 (2007).
Moody, M. P., Gault, B., Stephenson, L. T., Haley, D. & Ringer, S. P. Qualification of the tomographic reconstruction in atom probe by advanced spatial distribution map techniques. Ultramicroscopy 109, 815–824 (2009).
Moody, M. P., Tang, F., Gault, B., Ringer, S. P. & Cairney, J. M. Atom probe crystallography: characterization of grain boundary orientation relationships in nanocrystalline aluminium. Ultramicroscopy 111, 493–499 (2011).
Gault, B. et al. Advances in the calibration of atom probe tomographic reconstruction. J. Appl. Phys. 105, 34913 (2009).
Vurpillot, F., Da Costa, G., Menand, A. & Blavette, D. Structural analyses in three-dimensional atom probe: a Fourier approach. J. Microsc. 203, 295–302 (2001).
Gault, B. et al. Spatial resolution in atom probe tomography. Microsc. Microanal. 16, 99–110 (2010).
Ringer, S. P. Advanced nanostructural analysis of aluminium alloys using atom probe tomography. Mater. Sci. Forum 519–521, 25–34 (2006).
Blavette, D., Cadel, E. & Deconihout, B. The role of the atom probe in the study of nickel-based superalloys. Mater. Charact. 44, 133–157 (2000).
Blavette, D., Cadel, E., Pareige, C., Deconihout, B. & Caron, P. Phase transformation and segregation to lattice defects in Ni-base superalloys. Microsc. Microanal. 13, 464–483 (2007).
Seidman, D. N., Sudbrack, C. K. & Yoon, K. E. The use of 3-D atom-probe tomography to study nickel-based superalloys. JOM 58, 34–39 (2006).
Klein, T., Clemens, H. & Mayer, S. Advancement of compositional and microstructural design of intermetallic γ-TiAl based alloys determined by atom probe tomography. Materials (Basel). 9, 755 (2016).
Borchers, C. & Kirchheim, R. Cold-drawn pearlitic steel wires. Prog. Mater. Sci. 82, 405–444 (2016).
Raabe, D. et al. Grain boundary segregation engineering in metallic alloys: a pathway to the design of interfaces. Curr. Opin. Solid. State Mater. Sci. 18, 253–261 (2014).
Manzoni, A. M. & Glatzel, U. New multiphase compositionally complex alloys driven by the high entropy alloy approach. Mater. Charact. 147, 512–532 (2019).
Marquis, E. A. et al. Nuclear reactor materials at the atomic scale. Mater. Today 12, 30–37 (2009).
Marquis, E. A. et al. On the current role of atom probe tomography in materials characterization and materials science. Curr. Opin. Solid. State Mater. Sci. 17, 217–223 (2013).
Ardell, A. J. & Bellon, P. Radiation-induced solute segregation in metallic alloys. Curr. Opin. Solid. State Mater. Sci. 20, 115–139 (2016).
Yu, Y. et al. Revealing nano-chemistry at lattice defects in thermoelectric materials using atom probe tomography. Mater. Today 32, 260–274 (2020).
Giddings, A. D. et al. Industrial application of atom probe tomography to semiconductor devices. Scr. Mater. 148, 82–90 (2018).
Vandervorst, W. et al. Dopant, composition and carrier profiling for 3D structures. Mater. Sci. Semicond. Process. 62, 31–48 (2017).
Chang, A. S. & Lauhon, L. J. Atom probe tomography of nanoscale architectures in functional materials for electronic and photonic applications. Curr. Opin. Solid. State Mater. Sci. 22, 171–187 (2018).
Rigutti, L., Bonef, B., Speck, J., Tang, F. & Oliver, R. A. Atom probe tomography of nitride semiconductors. Scr. Mater. 148, 75–81 (2017).
Saxey, D. W., Moser, D. E., Piazolo, S., Reddy, S. M. & Valley, J. W. Atomic worlds: current state and future of atom probe tomography in geoscience. Scr. Mater. 148, 115–121 (2018). This brief critical review article discusses the application of APT to geological materials, and what the technique can provide in this context.
Verberne, R. et al. The geochemical and geochronological implications of nanoscale trace-element clusters in rutile. Geology 48, 1126–1130 (2020).
Marceau, R. K. W., Sha, G., Lumley, R. N. & Ringer, S. P. Evolution of solute clustering in Al–Cu–Mg alloys during secondary ageing. Acta Mater. 58, 1795–1805 (2010).
Medrano, S. et al. Cluster hardening in Al–3Mg triggered by small Cu additions. Acta Mater. 161, 12–20 (2018).
Bachhav, M., Robert Odette, G. & Marquis, E. A. α′ precipitation in neutron-irradiated Fe–Cr alloys. Scr. Mater. 74, 48–51 (2014).
Li, T. et al. New insights into the phase transformations to isothermal ω and ω-assisted α in near β-Ti alloys. Acta Mater. 106, 353–366 (2016).
Cojocaru-Miredin, O., Cadel, E., Vurpillot, F., Mangelinck, D. & Blavette, D. Three-dimensional atomic-scale imaging of boron clusters in implanted silicon. Scr. Mater. 60, 285–288 (2009).
Duguay, S. et al. Evidence of atomic-scale arsenic clustering in highly doped silicon. J. Appl. Phys. 106, 106102 (2009).
Ronsheim, P. et al. Impurity measurements in silicon with D-SIMS and atom probe tomography. Appl. Surf. Sci. 255, 1547–1550 (2008).
Marceau, R. K. W., Ceguerra, A. V., Breen, A. J., Raabe, D. & Ringer, S. P. Quantitative chemical-structure evaluation using atom probe tomography: short-range order analysis of Fe–Al. Ultramicroscopy 157, 12–20 (2015).
Marquis, E. A. & Vurpillot, F. Chromatic aberrations in the field evaporation behavior of small precipitates. Microsc. Microanal. 14, 561–570 (2008).
Thompson, K., Booske, J. H., Larson, D. J. & Kelly, T. F. Three-dimensional atom mapping of dopants in Si nanostructures. Appl. Phys. Lett. 87, 52108 (2005).
Schwarz, T. et al. Correlative transmission Kikuchi diffraction and atom probe tomography study of Cu(In,Ga)Se2 grain boundaries. Prog. Photovolt. Res. Appl. 26, 196–204 (2018).
Schwarz, T., Lomuscio, A., Siebentritt, S. & Gault, B. On the chemistry of grain boundaries in CuInS2 films. Nano Energy 76, 105081 (2020).
Stoffers, A. et al. Complex nanotwin substructure of an asymmetric Σ9 tilt grain boundary in a silicon polycrystal. Phys. Rev. Lett. 115, 235502 (2015).
Raghuwanshi, M., Wuerz, R. & Cojocaru-Mirédin, O. Interconnection between trait, structure, and composition of grain boundaries in Cu(In,Ga)Se2 thin-film solar cells. Adv. Funct. Mater. 30, 1–9 (2020).
Dyck, O. et al. Accurate quantification of Si/SiGe interface profiles via atom probe tomography. Adv. Mater. Interfaces 4, 1700622 (2017).
Mangelinck, D. et al. Atom probe tomography for advanced metallization. Microelectron. Eng. 120, 19–33 (2014).
Panciera, F. et al. Three dimensional distributions of arsenic and platinum within NiSi contact and gate of an n-type transistor. Appl. Phys. Lett. 99, 51911 (2011).
Panciera, F. et al. Ni(Pt)-silicide contacts on CMOS devices: impact of substrate nature and Pt concentration on the phase formation. Microelectron. Eng. 120, 34–40 (2014).
Shimizu, Y. et al. Impact of carbon coimplantation on boron behavior in silicon: carbon–boron coclustering and suppression of boron diffusion. Appl. Phys. Lett. 98, 232101 (2011).
Inoue, K. et al. Dopant distributions in n-MOSFET structure observed by atom probe tomography. Ultramicroscopy 109, 1479–1484 (2009).
Tang, F. et al. Indium clustering in a-plane InGaN quantum wells as evidenced by atom probe tomography. Appl. Phys. Lett. 106, 072104 (2015).
Galtrey, M. J. et al. Three-dimensional atom probe studies of an InxGa1−xN∕GaN multiple quantum well structure: assessment of possible indium clustering. Appl. Phys. Lett. 90, 61903 (2007).
Riley, J. R. et al. Three-dimensional mapping of quantum wells in a GaN/InGaN core-shell nanowire light-emitting diode array. Nano Lett. 13, 4317–4325 (2013).
Gorman, B. P. et al. in 2011 37th IEEE Photovoltaic Specialists Conf. 3357–3359 (IEEE, 2011).
Dietrich, J. et al. Origins of electrostatic potential wells at dislocations in polycrystalline Cu(In,Ga)Se2 thin films. J. Appl. Phys. 115, 103507 (2014).
Cojocaru-Mirédin, O. et al. Interface engineering and characterization at the atomic-scale of pure and mixed ion layer gas reaction buffer layers in chalcopyrite thin-film solar cells. Prog. Photovoltaics Res. Appl. 23, 705–716 (2014).
Larson, D. J., Petford-Long, A. K., Ma, Y. Q. & Cerezo, A. Information storage materials: nanoscale characterisation by three-dimensional atom probe analysis. Acta Mater. 52, 2847–2862 (2004).
Vovk, V., Schmitz, G., Hutten, A. & Heitmann, S. Mismatch-induced recrystallization of giant magneto-resistance (GMR) multilayer systems. Acta Mater. 55, 3033–3047 (2007).
Gault, B. et al. High-resolution nanostructural investigation of Zn4Sb3 alloys. Scr. Mater. 63, 784–787 (2010).
Yu, Y. et al. Ag-segregation to dislocations in PbTe-based thermoelectric materials. ACS Appl. Mater. Interfaces 10, 3609–3615 (2018).
Gomell, L. et al. Properties and influence of microstructure and crystal defects in Fe2VAl modified by laser surface remelting. Scr. Mater. 193, 153–157 (2021).
Krakauer, B. W. & Seidman, D. N. Absolute atomic-scale measurements of the Gibbsian interfacial excess of solute at internal interfaces. Phys. Rev. B 48, 6724–6727 (1993).
Jia, Y. et al. L10 rare-earth-free permanent magnets: the effects of twinning versus dislocations in Mn–Al magnets. Phys. Rev. Mater. 4, 094402 (2020).
Herbig, M. et al. Grain boundary segregation in Fe–Mn–C twinning-induced plasticity steels studied by correlative electron backscatter diffraction and atom probe tomography. Acta Mater. 83, 37–47 (2015).
Cantwell, P. R. et al. Grain boundary complexion transitions. Annu. Rev. Mater. Res. 50, 465–492 (2020).
Peter, N. J. et al. Segregation-induced nanofaceting transition at an asymmetric tilt grain boundary in copper. Phys. Rev. Lett. 121, 255502 (2018).
Zhao, H. et al. Interplay of chemistry and faceting at grain boundaries in a model Al alloy. Phys. Rev. Lett. 124, 106102 (2020).
Kwiatkowski da Silva, A. et al. Phase nucleation through confined spinodal fluctuations at crystal defects evidenced in Fe–Mn alloys. Nat. Commun. 9, 1137 (2018).
Chang, L., Barnard, S. J. & Smith, G. D. W. in Gilbert R. Speich Symp. Proc.: Fundamentals of Aging and Tempering in Bainitic and Martensitic Steel Products (eds Krauss, G. & Repas, P. E.) 19–28 (Iron and Steel Society, 1992).
Blavette, D., Cadel, E., Fraczkeiwicz, A. & Menand, A. Three-dimensional atomic-scale imaging of impurity segregation to line defects. Science 286, 2317–2319 (1999).
Thompson, K., Flaitz, P. L., Ronsheim, P., Larson, D. J. & Kelly, T. F. Imaging of arsenic Cottrell atmospheres around silicon defects by three-dimensional atom probe tomography. Science 317, 1370–1374 (2007).
Hoummada, K., Mangelinck, D., Gault, B. & Cabié, M. Nickel segregation on dislocation loops in implanted silicon. Scr. Mater. 64, 378–381 (2011).
Zhou, X. et al. The hidden structure dependence of the chemical life of dislocations. Sci. Adv. 7, eabf0563 (2021).
Williams, C. A., Hyde, J. M., Smith, G. D. W. & Marquis, E. A. Effects of heavy-ion irradiation on solute segregation to dislocations in oxide-dispersion-strengthened Eurofer 97 steel. J. Nucl. Mater. 412, 100–105 (2011).
Bachhav, M., Yao, L., Robert Odette, G. & Marquis, E. A. Microstructural changes in a neutron-irradiated Fe–6 at.%Cr alloy. J. Nucl. Mater. 453, 334–339 (2014).
Felfer, P., Ceguerra, A., Ringer, S. & Cairney, J. Applying computational geometry techniques for advanced feature analysis in atom probe data. Ultramicroscopy 132, 100–106 (2013).
Kuzmina, M., Herbig, M., Ponge, D., Sandlobes, S. & Raabe, D. Linear complexions: confined chemical and structural states at dislocations. Science 349, 1080–1083 (2015).
Abou-Ras, D. et al. Compositional and electrical properties of line and planar defects in Cu(In,Ga)Se2 thin films for solar cells—a review. Phys. Status Solidi Rapid Res. Lett. 10, 363–375 (2016).
Makineni, S. K. et al. On the diffusive phase transformation mechanism assisted by extended dislocations during creep of a single crystal CoNi-based superalloy. Acta Mater. 155, 362–371 (2018).
Cadel, E., Lemarchand, D., Gay, A.-S., Fraczkiewicz, A. & Blavette, D. Atomic scale investigation of boron nanosegregation in FeAl intermetallics. Scr. Mater. 41, 421–426 (1999).
Herschitz, R. & Seidman, D. N. Atomic resolution observations of solute-atom segregation effects and phase transitions in stacking faults in dilute cobalt alloys—I. Experimental results. Acta Metall. 33, 1547–1563 (1985).
Makineni, S. K. et al. Elemental segregation to antiphase boundaries in a crept CoNi-based single crystal superalloy. Scr. Mater. 157, 62–66 (2018).
Gomell, L. et al. Chemical segregation and precipitation at anti-phase boundaries in thermoelectric Heusler-Fe2VAl. Scr. Mater. 186, 370–374 (2020).
Marceau, R. K. W. et al. Multi-scale correlative microscopy investigation of both structure and chemistry of deformation twin bundles in Fe–Mn–C steel. Microsc. Microanal. 19, 1581–1585 (2013).
Barba, D. et al. On the composition of microtwins in a single crystal nickel-based superalloy. Scr. Mater. 127, 37–40 (2017).
Antonov, S., Li, B., Gault, B. & Tan, Q. The effect of solute segregation to deformation twin boundaries on the electrical resistivity of a single-phase superalloy. Scr. Mater. 186, 208–212 (2020).
Palanisamy, D., Raabe, D. & Gault, B. Elemental segregation to twin boundaries in a MnAl ferromagnetic Heusler alloy. Scr. Mater. 155, 144–148 (2018).
Palanisamy, D., Raabe, D. & Gault, B. On the compositional partitioning during phase transformation in a binary ferromagnetic MnAl alloy. Acta Mater. 174, 227–236 (2019).
He, J. et al. On the atomic solute diffusional mechanisms during compressive creep deformation of a Co–Al–W–Ta single crystal superalloy. Acta Mater. 184, 86–99 (2020).
Auger, P., Pareige, P., Welzel, S. & Van Duysen, J. C. Synthesis of atom probe experiments on irradiation-induced solute segregation in French ferritic pressure vessel steels. J. Nucl. Mater. 280, 331–344 (2000).
Miller, M. K., Sokolov, M. A., Nanstad, R. K. & Russell, K. F. APT characterization of high nickel RPV steels. J. Nucl. Mater. 351, 187–196 (2006).
Williams, C. A., Marquis, E. A., Cerezo, A. & Smith, G. D. W. Nanoscale characterisation of ODS-Eurofer 97 steel: an atom-probe tomography study. J. Nucl. Mater. 400, 37–45 (2010).
Hyde, J. M., Ellis, D., English, C. A. & Williams, T. J. in Institution of Chemical Engineers Symposium Series (eds Rosinski, S., Grossbeck, M., Allen, T. & Kumar, A.) 262–288 (ASTM International, 2000).
Takeuchi, T. et al. Effects of neutron irradiation on microstructures and hardness of stainless steel weld-overlay cladding of nuclear reactor pressure vessels. J. Nucl. Mater. 449, 273–276 (2014).
Meisnar, M., Moody, M. & Lozano-Perez, S. Atom probe tomography of stress corrosion crack tips in SUS316 stainless steels. Corros. Sci. 98, 661–671 (2015).
Lozano-Perez, S., Kruska, K., Iyengar, I., Terachi, T. & Yamada, T. The role of cold work and applied stress on surface oxidation of 304 stainless steel. Corros. Sci. 56, 78–85 (2012).
Schreiber, D. K. et al. Examinations of oxidation and sulfidation of grain boundaries in alloy 600 exposed to simulated pressurized water reactor primary water. Microsc. Microanal. 19, 676–687 (2013).
Hudson, D. & Smith, G. D. W. Initial observation of grain boundary solute segregation in a zirconium alloy (ZIRLO) by three-dimensional atom probe. Scr. Mater. 61, 411–414 (2009).
Dong, Y., Motta, A. T. & Marquis, E. A. Atom probe tomography study of alloying element distributions in Zr alloys and their oxides. J. Nucl. Mater. 442, 270–281 (2013).
Gin, S., Ryan, J. V., Schreiber, D. K., Neeway, J. & Cabié, M. Contribution of atom-probe tomography to a better understanding of glass alteration mechanisms: application to a nuclear glass specimen altered 25years in a granitic environment. Chem. Geol. 349–350, 99–109 (2013).
He, L. F. et al. Bubble formation and Kr distribution in Kr-irradiated UO2. J. Nucl. Mater. 456, 125–132 (2015).
Edmondson, P. D., Parish, C. M., Zhang, Y., Hallén, A. & Miller, M. K. Helium entrapment in a nanostructured ferritic alloy. Scr. Mater. 65, 731–734 (2011).
Gemma, R., Al-Kassab, T., Kirchheim, R. & Pundt, A. Studies on hydrogen loaded V–Fe8 at% films on Al2O3 substrate. J. Alloy. Compd. 446–447, 534–538 (2007).
Takahashi, J., Kawakami, K., Kobayashi, Y. & Tarui, T. The first direct observation of hydrogen trapping sites in TiC precipitation-hardening steel through atom probe tomography. Scr. Mater. 63, 261–264 (2010).
Mouton, I. et al. Quantification challenges for atom probe tomography of hydrogen and deuterium in Zircaloy-4. Microsc. Microanal. 25, 481–488 (2018).
Chang, Y. H. et al. Quantification of solute deuterium in titanium deuteride by atom probe tomography with both laser pulsing and high-voltage pulsing: Influence of the surface electric field. N. J. Phys. 21, 053025 (2019).
Breen, A. J., Stephenson, L. T., Sun, B., Li, Y. & Kasian, O. Solute hydrogen and deuterium observed at the near atomic scale in high-strength steel. Acta Mater. 188, 108–120 (2020).
Takahashi, J., Kawakami, K. & Kobayashi, Y. Origin of hydrogen trapping site in vanadium carbide precipitation strengthening steel. Acta Mater. 153, 193–204 (2018).
Breen, A. J. et al. Atomic scale analysis of grain boundary deuteride growth front in Zircaloy-4. Scr. Mater. 156, 42–46 (2018).
Chang, Y. et al. Characterizing solute hydrogen and hydrides in pure and alloyed titanium at the atomic scale. Acta Mater. 150, 273–280 (2018).
Mouton, I. et al. Hydride growth mechanism in zircaloy-4: investigation of the partitioning of alloying elements. Materialia 15, 101006 (2021).
Miller, M. K. & Russell, K. F. An APFIM investigation of a weathered region of the Santa Catharina meteorite. Surf. Sci. 266, 441–445 (1992).
Kuhlman, K. R., Martens, R. L., Kelly, T. F., Evans, N. D. & Miller, M. K. Fabrication of specimens of metamorphic magnetite crystals for field ion microscopy and atom probe microanalysis. Ultramicroscopy 89, 169–176 (2001).
Valley, J. W. et al. Nano-and micro-geochronology in Hadean and Archean zircons by atom-probe tomography and SIMS: new tools for old minerals. Am. Mineral. 100, 1355–1377 (2015).
Reddy, S. M. et al. Atom probe tomography: development and application to the geosciences. Geostand. Geoanalytical Res. 44, 5–50 (2020).
Fougerouse, D. et al. Nanoscale distribution of Pb in monazite revealed by atom probe microscopy. Chem. Geol. 479, 251–258 (2018).
Piazolo, S. et al. Deformation-induced trace element redistribution in zircon revealed using atom probe tomography. Nat. Commun. 7, 10490 (2016).
Peterman, E. M. et al. Nanoscale processes of trace element mobility in metamorphosed zircon. Contrib. Mineral. Petrol. 174, 92 (2019).
Blum, T. B. et al. in Microstructural Geochronology: Planetary Records Down to Atom Scale Ch. 16 (eds, Moser, D. E., Corfu, F., Darling, J. R., Reddy, S. M. & Tait, K.) 327–350 (American Geophysical Union, 2018).
Arcuri, G. A., Moser, D. E., Reinhard, D. A., Langelier, B. & Larson, D. J. Impact-triggered nanoscale Pb clustering and Pb loss domains in Archean zircon. Contrib. Mineral. Petrol. 175, 59 (2020).
Moser, D. E. et al. Decline of giant impacts on Mars by 4.48 billion years ago and an early opportunity for habitability. Nat. Geosci. 12, 522–527 (2019).
White, L. F. et al. Nanoscale chemical characterisation of phase separation, solid state transformation, and recrystallization in feldspar and maskelynite using atom probe tomography. Contrib. Mineral. Petrol. 173, 87 (2018).
Blum, T. B. et al. A nanoscale record of impact-induced Pb mobility in lunar zircon. Microsc. Microanal. 25, 2448–2449 (2019).
Greer, J. et al. Atom probe tomography of space-weathered lunar ilmenite grain surfaces. Meteorit. Planet. Sci. 55, 426–440 (2020).
Daly, L. et al. Nebula sulfidation and evidence for migration of “free-floating” refractory metal nuggets revealed by atom probe microscopy. Geology 45, 847–850 (2017).
Lewis, J. B., Isheim, D., Floss, C. & Seidman, D. N. C12/C13-ratio determination in nanodiamonds by atom-probe tomography. Ultramicroscopy 159, 248–254 (2015).
Dubosq, R., Rogowitz, A., Schweinar, K., Gault, B. & Schneider, D. A. D. A. A 2D and 3D nanostructural study of naturally deformed pyrite: assessing the links between trace element mobility and defect structures. Contrib. Mineral. Petrol. 174, 72 (2019).
Fougerouse, D. et al. Time-resolved, defect-hosted, trace element mobility in deformed Witwatersrand pyrite. Geosci. Front. 10, 55–63 (2019).
Wu, Y.-F. et al. Gold, arsenic, and copper zoning in pyrite: a record of fluid chemistry and growth kinetics. Geology 47, 641–644 (2019).
Gopon, P., Douglas, J. O., Wade, J. & Moody, M. P. Complementary SEM-EDS/FIB-SEM sample preparation techniques for atom probe tomography of nanophase-Fe0 in apollo 16 regolith sample 61501,22. Microsc. Microanal. 25, 2544–2545 (2019).
Cao, M. et al. Micro- and nano-scale textural and compositional zonation in plagioclase at the Black Mountain porphyry Cu deposit: implications for magmatic processes. Am. Mineral. 104, 391–402 (2019).
Parman, S. W., Diercks, D. R., Gorman, B. P. & Cooper, R. F. Atom probe tomography of isoferroplatinum. Am. Min. 100, 852–860 (2015).
Dubosq, R., Rogowitz, A., Schneider, D. A., Schweinar, K. & Gault, B. Fluid inclusion induced hardening: nanoscale evidence from naturally deformed pyrite. Contrib. Mineral. Petrol. 176, 15 (2021).
Petrishcheva, E. et al. Spinodal decomposition in alkali feldspar studied by atom probe tomography. Phys. Chem. Miner. 47, 30 (2020).
Honour, V. C. et al. Compositional boundary layers trigger liquid unmixing in a basaltic crystal mush. Nat. Commun. 10, 4821 (2019).
Schipper, C. I. et al. Volcanic SiO2-cristobalite: a natural product of chemical vapor deposition. Am. Mineral. 105, 510–524 (2020).
Taylor, S. D. et al. Resolving Iron(II) sorption and oxidative growth on hematite (001) using atom probe tomography. J. Phys. Chem. C. 122, 3903–3914 (2018).
Taylor, S. D. et al. Visualizing the iron atom exchange front in the Fe(II)-catalyzed recrystallization of goethite by atom probe tomography. Proc. Natl Acad. Sci. USA 116, 2866–2874 (2019).
Bloch, E. M. et al. Diffusion of calcium in forsterite and ultra-high resolution of experimental diffusion profiles in minerals using local electrode atom probe tomography. Geochim. Cosmochim. Acta 265, 85–95 (2019).
Cukjati, J. T. et al. Differences in chemical thickness of grain and phase boundaries: an atom probe tomography study of experimentally deformed wehrlite. Phys. Chem. Miner. 46, 845–859 (2019).
Montalvo, S. D. et al. Nanoscale constraints on the shock-induced transformation of zircon to reidite. Chem. Geol. 507, 85–95 (2019).
Rout, S. S. et al. Atom-probe tomography and transmission electron microscopy of the kamacite–taenite interface in the fast-cooled Bristol IVA iron meteorite. Meteorit. Planet. Sci. 52, 2707–2729 (2017).
Gamal El Dien, H. et al. Cr-spinel records metasomatism not petrogenesis of mantle rocks. Nat. Commun. 10, 5103 (2019).
Genareau, K., Perez-Huerta, A. & Laiginhas, F. Atom probe tomography analysis of exsolved mineral phases. J. Vis. Exp. 2019, e59863 (2019).
Visart de Bocarmé, T., Chau, T.-D. & Kruse, N. Dynamic interaction of CO/H2O mixtures with gold nanocrystals: real-time imaging and local chemical probing. Surf. Sci. 600, 4205–4210 (2006).
Visart de Bocarmé, T., Beketov, G. & Kruse, N. Water formation from O2 and H2 on Rh tips: studies by field ion microscopy and pulsed field desorption mass spectrometry. in. Surf. Interface Anal. 36, 522–527 (2004).
Kruse, N., Schweicher, J., Bundhoo, A., Frennet, A. & Visart de Bocarmé, T. Catalytic CO hydrogenation: mechanism and kinetics from chemical transients at low and atmospheric pressures. Top. Catal. 48, 145–152 (2008).
Barroo, C., Akey, A. J. & Bell, D. C. Atom probe tomography for catalysis applications: a review. Appl. Sci. 9, 2721 (2019).
Perea, D. E. et al. Determining the location and nearest neighbours of aluminium in zeolites with atom probe tomography. Nat. Commun. 6, 7589 (2015).
Schmidt, J. E., Peng, L., Poplawsky, J. D. & Weckhuysen, B. M. Nanoscale chemical imaging of zeolites using atom probe tomography. Angew. Chem. Int. Ed. 57, 10422–10435 (2018).
Ji, Z., Li, T. & Yaghi, O. M. Sequencing of metals in multivariate metal–organic frameworks. Science 369, 674–680 (2020).
El-Zoka, A. A., Langelier, B., Korinek, A., Botton, G. A. & Newman, R. C. Nanoscale mechanism of the stabilization of nanoporous gold by alloyed platinum. Nanoscale 10, 4904–4912 (2018).
El-Zoka, A. A., Langelier, B., Botton, G. A. & Newman, R. C. Enhanced analysis of nanoporous gold by atom probe tomography. Mater. Charact. 128, 269–277 (2017).
Li, T. et al. Atomic-scale insights into surface species of electrocatalysts in three dimensions. Nat. Catal. 1, 300–305 (2018).
Kasian, O. et al. Degradation of iridium oxides via oxygen evolution from the lattice: correlating atomic scale structure with reaction mechanisms. Energy Environ. Sci. 12, 3548–3555 (2019).
Schweinar, K. et al. Probing catalytic surfaces by correlative scanning photoemission electron microscopy and atom probe tomography. J. Mater. Chem. A 8, 388–400 (2019).
Gordon, L. M. & Joester, D. Nanoscale chemical tomography of buried organic-inorganic interfaces in the chiton tooth. Nature 469, 194–197 (2011).
Gordon, L. M. et al. Amorphous intergranular phases control the properties of rodent tooth enamel. Science 347, 746–750 (2015).
La Fontaine, A. et al. Atomic-scale compositional mapping reveals Mg-rich amorphous calcium phosphate in human dental enamel. Sci. Adv. 2, e1601145 (2016).
Branson, O. et al. Nanometer-scale chemistry of a calcite biomineralization template: implications for skeletal composition and nucleation. Proc. Natl Acad. Sci. USA 113, 12934 LP–12912939 (2016).
Eder, K., Otter, L. M., Yang, L., Jacob, D. E. & Cairney, J. M. Overcoming challenges associated with the analysis of nacre by atom probe tomography. Geostand. Geoanalytical Res. 43, 385–395 (2019).
Langelier, B., Wang, X. & Grandfield, K. Atomic scale chemical tomography of human bone. Sci. Rep. 7, 1–9 (2017).
Gordon, L. M., Tran, L. & Joester, D. Atom probe tomography of apatites and bone-type mineralized tissues. ACS Nano 6, 10667–10675 (2012).
Pérez-Huerta, A. & Laiginhas, F. Preliminary data on the nanoscale chemical characterization of the inter-crystalline organic matrix of a calcium carbonate biomineral. Minerals 8, 223 (2018).
Pérez-Huerta, A., Suzuki, M., Cappelli, C., Laiginhas, F. & Kintsu, H. Atom probe tomography (APT) characterization of organics occluded in single calcite crystals: implications for biomineralization studies. C. J. Carbon Res. 5, 50 (2019).
Nishikawa, O., Taniguchi, M., Watanabe, S., Yamagishi, A. & Sasaki, T. Scanning atom probe study of dissociation of organic molecules on titanium oxide. Jpn. J. Appl. Phys. 45, 1892–1896 (2006).
Proudian, A. P. et al. Effect of diels-alder reaction in C60-tetracene photovoltaic devices. Nano Lett. 16, 6086–6091 (2016).
Proudian, A. P., Jaskot, M. B., Diercks, D. R., Gorman, B. P. & Zimmerman, J. D. Atom probe tomography of molecular organic materials: sub-dalton nanometer-scale quantification. Chem. Mater. 31, 2241–2247 (2019).
Eder, K. et al. A new approach to understand the adsorption of thiophene on different surfaces: an atom probe investigation of self-assembled monolayers. Langmuir 33, 9573–9581 (2017).
Mohanty, S. K. & Tolochko, O. An atom probe analysis of self-assembled monolayers: a novel approach to investigate mixed and unmixed self-assembled monolayers (SAMs) on gold. Appl. Surf. Sci. 494, 152–161 (2019).
Wang, L. R. C., Kreuzer, H. J. & Nishikawa, O. Polythiophene in strong electrostatic fields. Org. Electron. 7, 99–106 (2006).
Nickerson, B. S., Karahka, M. & Kreuzer, H. J. Disintegration and field evaporation of thiolate polymers in high electric fields. Ultramicroscopy 159, 173–177 (2015).
Nishikawa, O., Taniguchi, M. & Saito, Y. Study of characteristic fragmentation of nanocarbon by the scanning atom probe. J. Vac. Sci. Technol. A 26, 1074 (2008).
Graham, W. R. & Hutchins, F. Field-Ion microscopy of DNA and RNA. Bull. Am. Phys. Soc. 18, 296 (1973).
Panitz, J. A. & Giaever, I. Ferritin deposition on field-emitter tips. Ultramicroscopy 6, 3–6 (1981).
Greene, M., Prosa, T. J., Larson, D. J. & Kelly, T. F. Focused Ion beam fabrication of solidified ferritin into nanoscale volumes for compositional analysis using time-of-flight mass spectrometry methods. Microsc. Microanal. 16, 1860–1861 (2010).
Perea, D. E. et al. Atom probe tomographic mapping directly reveals the atomic distribution of phosphorus in resin embedded ferritin. Sci. Rep. 6, 1–9 (2016).
Rusitzka, K. A. K. et al. A near atomic-scale view at the composition of amyloid-β fibrils by atom probe tomography. Sci. Rep. 8, 1–10 (2018).
Narayan, K., Prosa, T. J., Fu, J., Kelly, T. F. & Subramaniam, S. Chemical mapping of mammalian cells by atom probe tomography. J. Struct. Biol. 178, 98–107 (2012).
Adineh, V. R., Marceau, R. K. W., Velkov, T., Li, J. & Fu, J. Near-atomic three-dimensional mapping for site-specific chemistry of ‘Superbugs’. Nano Lett. 16, 7113–7120 (2016).
Sundell, G., Hulander, M., Pihl, A. & Andersson, M. Atom probe tomography for 3D structural and chemical analysis of individual proteins. Small 15, 1900316 (2019).
McCarroll, I. E., Bagot, P. A. J., Devaraj, A., Perea, D. E. & Cairney, J. M. New frontiers in atom probe tomography: a review of research enabled by cryo and/or vacuum transfer systems. Mater. Today Adv. 7, 100090 (2020). This short review article discusses the developments and new applications in cryogenic transfer and cryogenic APT.
Blum, T. B. et al. in Microscructural Geochronology: Planetary Records Down to Atom Scale Ch. 18 (eds Moser, D. E., Corfu, F., Darling, J. R., Reddy, S. M. & Tait, K.) 369–373 (American Geophysical Union, 2017).
Haley, D., London, A. J. & Moody, M. P. Processing APT spectral backgrounds for improved quantification. Microsc. Microanal. 26, 964–977 (2020).
Kühbach, M. et al. Building a library of simulated atom probe data for different crystal structures and tip orientations using TAPSim. Microsc. Microanal. 25, 320–330 (2019).
Cairney, J. M. et al. Mining information from atom probe data. Ultramicroscopy 159, 324–337 (2015).
Ceguerra, A. V. A. V. et al. The rise of computational techniques in atom probe microscopy. Curr. Opin. Solid. State Mater. Sci. 17, 224–235 (2013).
Kühbach, M., Bajaj, P., Çelik, M. H., Jägle, E. A. & Gault, B. On strong scaling and open source tools for analyzing atom probe tomography data. Preprint at https://arxiv.org/abs/2004.05188 (2020).
Keutgen, J., London, A. J. & Cojocaru-Mirédin, O. Solving peak overlaps for proximity histogram analysis of complex interfaces for atom probe tomography data. Microsc. Microanal. 27, 28–35 (2020).
Exertier, F. et al. Atom probe tomography analysis of the reference zircon GJ-1: an interlaboratory study. Chem. Geol. 495, 27–35 (2018).
Diercks, D. R., Gorman, B. P. & Gerstl, S. S. A. An open-access atom probe tomography mass spectrum database. Microsc. Microanal. 23, 664–665 (2017).
Kelly, T. F., Geiser, B. P. & Larson, D. J. Definition of spatial resolution in atom probe tomography. Microsc. Microanal. 13, 1604–1605 (2007).
Gault, B. et al. Origin of the spatial resolution in atom probe microscopy. Appl. Phys. Lett. 95, 34103 (2009).
Cadel, E., Vurpillot, F., Larde, R., Duguay, S. & Deconihout, B. Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors. J. Appl. Phys. 106, 44908 (2009).
Gault, B. et al. Influence of the wavelength on the spatial resolution of pulsed-laser atom probe. J. Appl. Phys. 110, 94901 (2011).
Hyde, J. M., Cerezo, A., Setna, R. P., Warren, P. J. & Smith, G. D. W. Lateral and depth scale calibration of the position sensitive atom probe. Appl. Surf. Sci. 76–77, 382–391 (1994).
Gault, B. et al. Dynamic reconstruction for atom probe tomography. Ultramicroscopy 111, 1619–1624 (2011).
Gault, B., La Fontaine, A., Moody, M. P., Ringer, S. P. & Marquis, E. A. Impact of laser pulsing on the reconstruction in an atom probe tomography. Ultramicroscopy 110, 1215–1222 (2010).
Moore, A. J. W. & Spink, J. A. Influence of surface coordination on field evaporation processes in tungsten. Surf. Sci. 44, 198–212 (1974).
Vurpillot, F. & Oberdorfer, C. Modeling atom probe tomography: a review. Ultramicroscopy 159, 202–216 (2015). This article presents an overview of image simulations and field evaporation modelling techniques.
Sanchez, C. G., Lozovoi, A. Y. & Alavi, A. Field-evaporation from first-principles. Mol. Phys. 102, 1045–1055 (2004).
Ashton, M., Mishra, A., Neugebauer, J. & Freysoldt, C. Ab initio description of bond breaking in large electric fields. Phys. Rev. Lett. 124, 176801 (2020). This article presents a new development of density-functional theory and its application to describe the field evaporation process ab initio.
Prokoshkina, D., Esin, V. A., Wilde, G. & Divinski, S. V. Grain boundary width, energy and self-diffusion in nickel: effect of material purity. Acta Mater. 61, 5188–5197 (2013).
Mistler, R. E. & Coble, R. L. Grain-boundary diffusion and boundary widths in metals and ceramics. J. Appl. Phys. 45, 1507–1509 (1974).
Chellali, M. R. et al. Triple junction transport and the impact of grain boundary width in nanocrystalline Cu. Nano Lett. 12, 3448–3454 (2012).
Danoix, F., Grancher, G., Bostel, A. & Blavette, D. Standard deviations of composition measurements in atom probe analyses. Part I conventional 1D atom probe. Ultramicroscopy 107, 734–738 (2007).
Gault, B. et al. Behavior of molecules and molecular ions near a field emitter. N. J. Phys. 18, 33031 (2016).
Sundell, G., Thuvander, M. & Andrén, H.-O. Hydrogen analysis in APT: methods to control adsorption and dissociation of H2. Ultramicroscopy 132, 285–289 (2013).
Gault, B., Danoix, F., Hoummada, K., Mangelinck, D. & Leitner, H. Impact of directional walk on atom probe microanalysis. Ultramicroscopy 113, 182–191 (2012).
Wang, S. C. & Tsong, T. T. Field and temperature-dependence of the directional walk of single adsorbed W-atoms on the W(110) plane. Phys. Rev. B 26, 6470–6475 (1982).
Marquis, E. A., Geiser, B. P., Prosa, T. J. & Larson, D. J. Evolution of tip shape during field evaporation of complex multilayer structures. J. Microsc. 241, 225–233 (2011).
Felfer, P. J. et al. A new approach to the determination of concentration profiles in atom probe tomography. Microsc. Microanal. 18, 359–364 (2012).
Sauvage, X. et al. Solid state amorphization in cold drawn Cu/Nb wires. Acta Mater. 49, 389–394 (2001).
Gault, B. et al. Atom probe tomography and transmission electron microscopy characterisation of precipitation in an Al–Cu–Li–Mg–Ag alloy. Ultramicroscopy 111, 683–689 (2011).
De Geuser, F. et al. An improved reconstruction procedure for the correction of local magnification effects in three-dimensional atom-probe. Surf. Interface Anal. 39, 268–272 (2007).
Kelly, T. F., Miller, M. K., Rajan, K. & Ringer, S. P. Atomic-scale tomography: a 2020 vision. Microsc. Microanal. 19, 652–664 (2013).
Kirchhofer, R., Diercks, D. R. & Gorman, B. P. Electron diffraction and imaging for atom probe tomography. Rev. Sci. Instrum. 89, 053706 (2018).
Schmitz, G. & Stender, P. Description: Method for preparation of needle tip for atom probe tomography, involves guiding through hole of planar drain electrode into measuring position based on measured coordinates of sample for performing tomography by manipulator. German patent DE102011119164 (2013).
Stender, P., Ott, J., Balla, I. & Schmitz, G. in NIST Special Publication 2100-03: Proc. Int. Conf. Atom Probe Tomography and Microscopy (APT&M 2018) (ed. NIST) 111 (NIST Special Publications, 2018).
Lambeets, S. V. et al. Nanoscale perspectives of metal degradation via in situ atom probe tomography. Top. Catal. 63, 1606–1622 (2020).
Dumpala, S., Broderick, S. R., Bagot, P. A. J. & Rajan, K. An integrated high temperature environmental cell for atom probe tomography studies of gas-surface reactions: instrumentation and results. Ultramicroscopy 141, 16–21 (2014).
Houard, J. et al. A photonic atom probe coupling 3D atomic scale analysis with in situ photoluminescence spectroscopy. Rev. Sci. Instrum. 91, 083704 (2020).
Gorman, B. Hardware engineering for an APT in a TEM objective lens. Microsc. Microanal. 26, 2614–2615 (2020).
Kelly, T., Dunin-Borkowski, R. & Meyer, J. Project Tomo: toward atomic-scale analytical tomography. Microsc. Microanal. 26, 2618–2621 (2020).
Walck, S. D. & Hren, J. J. FIM/IAP/TEM studies of hydrogen in metals. J. Phys. 45, 355–360 (1984).
Medeiros, J. M. et al. Robust workflow and instrumentation for cryo-focused ion beam milling of samples for electron cryotomography. Ultramicroscopy 190, 1–11 (2018).
Gerstl, S. S. A., Tacke, S., Chen, Y.-S., Wagner, J. & Wepf, R. Enabling atom probe analyses of new materials classes with vacuum-cryo-transfer capabilities. Microsc. Microanal. 23, 612 (2017).
Stephenson, L. T. et al. The Laplace project: an integrated suite for preparing and transferring atom probe samples under cryogenic and UHV conditions. PLoS ONE 13, 1–13 (2018).
Bagot, P. A. J., Visart de Bocarmé, T., Cerezo, A. & Smith, G. D. W. 3D atom probe study of gas adsorption and reaction on alloy catalyst surfaces I: instrumentation. Surf. Sci. 600, 3028–3035 (2006).
Chiaramonti, A. N. et al. A three-dimensional atom probe microscope incorporating a wavelength-tuneable femtosecond-pulsed coherent extreme ultraviolet light source. MRS Adv. 4, 2367–2375 (2019).
Chiaramonti, A. N. et al. Field Ion emission in an atom probe microscope triggered by femtosecond-pulsed coherent extreme ultraviolet light. Microsc. Microanal. 26, 258–266 (2020).
Viswanathan, B., Drachsel, W., Block, J. H. & Tsong, T. T. Photon enhanced field ionization on semiconductor surfaces. J. Chem. Phys. 70, 2582 (1979).
Suttle, J. et al. A superconducting ion detection scheme for atom probe tomography. APS March Meeting Abstracts 2016, Y7.003 (2016).
Bacchi, C. et al. Development of an energy-sensitive detector for the atom probe tomography. Preprint at https://arxiv.org/abs/2103.04765 (2021).
Vurpillot, F. et al. True atomic-scale imaging in three dimensions: a review of the rebirth of field-ion microscopy. Microsc. Microanal. 23, 1–11 (2017).
Vurpillot, F., Gilbert, M. & Deconihout, B. Towards the three-dimensional field ion microscope. Surf. Interface Anal. 39, 273–277 (2007).
Wille, C., Al-Kassab, T., Heinrich, A. & Kirchheim, R. in IVNC 2006/IFES 2006 17–18 (IEEE, 2006).
Dagan, M., Gault, B., Smith, G. D. W., Bagot, P. A. J. & Moody, M. P. Automated atom-by-atom three-dimensional (3D) reconstruction of field ion microscopy data. Microsc. Microanal. 23, 255–268 (2017).
Katnagallu, S. et al. Advanced data mining in field ion microscopy. Mater. Charact. 146, 307–318 (2018).
Klaes, B. et al. A model to predict image formation in the three-dimensional field ion microscope. Comput. Phys. Commun. 260, 107317 (2020).
Katnagallu, S., Morgado, F. F. F., Mouton, I., Gault, B. & Stephenson, L. T. Three-dimensional atomically-resolved analytical imaging with a field ion microscope. Preprint at https://arxiv.org/abs/2103.11010 (2021).
Silaeva, E. P., Uchida, K., Suzuki, Y. & Watanabe, K. Energetics and dynamics of laser-assisted field evaporation: time-dependent density functional theory simulations. Phys. Rev. B Condens. Matter Mater. Phys. 92, 15540 (2015).
Vurpillot, F., Bostel, A. & Blavette, D. Trajectory overlaps and local magnification in three-dimensional atom probe. Appl. Phys. Lett. 76, 3127–3129 (2000).
Oberdorfer, C., Eich, S. M., Lütkemeyer, M. & Schmitz, G. Applications of a versatile modelling approach to 3D atom probe simulations. Ultramicroscopy 159, 184–194 (2015).
Oberdorfer, C. et al. Influence of surface relaxation on solute atoms positioning within atom probe tomography reconstructions. Mater. Charact. 146, 324–335 (2018).
Larson, D. J., Gault, B., Geiser, B. P., De Geuser, F. & Vurpillot, F. Atom probe tomography spatial reconstruction: status and directions. Curr. Opin. Solid. State Mater. Sci. 17, 236–247 (2013). This critical review provides a perspective on the tomographic reconstruction process.
Beinke, D., Oberdorfer, C. & Schmitz, G. Towards an accurate volume reconstruction in atom probe tomography. Ultramicroscopy 165, 34–41 (2016).
Rolland, N. et al. An analytical model accounting for tip shape evolution during atom probe analysis of heterogeneous materials. Ultramicroscopy 159, 195–201 (2015).
Fletcher, C., Moody, M. P. & Haley, D. Towards model-driven reconstruction in atom probe tomography. J. Phys. D. Appl. Phys. 53, 475303 (2020).
Beinke, D. et al. Extracting the shape of nanometric field emitters. Nanoscale 12, 2820–2832 (2020).
Fleischmann, C., Paredis, K., Melkonyan, D. & Vandervorst, W. Revealing the 3-dimensional shape of atom probe tips by atomic force microscopy. Ultramicroscopy 194, 221–226 (2018).
Haley, D., Petersen, T., Ringer, S. P. & Smith, G. D. W. Atom probe trajectory mapping using experimental tip shape measurements. J. Microsc. 244, 170–180 (2011).
Fletcher, C., Moody, M. P. & Haley, D. Fast modelling of field evaporation in atom probe tomography using level set methods. J. Phys. D Appl. Phys. 52, 435305 (2019).
Wei, Y. et al. Machine-learning-based atom probe crystallographic analysis. Ultramicroscopy 194, 15–24 (2018).
Meisenkothen, F., Samarov, D. V., Kalish, I. & Steel, E. B. Exploring the accuracy of isotopic analyses in atom probe mass spectrometry. Ultramicroscopy 216, 113018 (2020).
Madireddy, S. et al. Phase segmentation in atom-probe tomography using deep learning-based edge detection. Sci. Rep. 9, 1–10 (2019).
Stintz, A. & Panitz, J. A. Imaging atom-probe analysis of an aqueous interface. J. Vac. Sci. Technol. Vacuum Surf. Film. 9, 1365–1367 (1991).
Stintz, A. & Panitz, J. A. Isothermal ramped field-desorption of water from metal-surfaces. J. Appl. Phys. 72, 741–745 (1992).
Pinkerton, T. D. et al. Electric field effects in ionization of water-ice layers on platinum. Langmuir 15, 851–855 (1999).
Stuve, E. M. Ionization of water in interfacial electric fields: an electrochemical view. Chem. Phys. Lett. 519–520, 1–17 (2012).
Adineh, V. R. et al. Graphene-enhanced 3D chemical mapping of biological specimens at near-atomic resolution. Adv. Funct. Mater. 28, 1801439 (2018). This article reports a new approach to enable the analysis of biological samples by APT, discussing aspects of what the technique can bring.
Qiu, S. et al. Direct imaging of liquid–nanoparticle interfaces with atom probe tomography. J. Phys. Chem. C 124, 19389–19395 (2020).
Panitz, J. A. In search of the chimera: molecular imaging in the atom-probe. Micros. Microanal. 11, 92–93 (2005).
Graham, W. R., Hutchinson, F. & Reed, D. A. Field ion microscope images of DNA and other organic molecules. J. Appl. Phys. 44, 5155–5159 (1973).
Kim, S. H. et al. Characterization of Pd and Pd@Au core-shell nanoparticles using atom probe tomography and field evaporation simulation. J. Alloy. Compd. 831, 154721 (2020).
Sha, G. et al. Segregation of solute elements at grain boundaries in an ultrafine grained Al–Zn–Mg–Cu alloy. Ultramicroscopy 111, 500–505 (2011).
Kontis, P. et al. Atomic-scale grain boundary engineering to overcome hot-cracking in additively-manufactured superalloys. Acta Mater. 177, 209–221 (2019).
Zhao, H. et al. Segregation assisted grain boundary precipitation in a model Al–Zn–Mg–Cu alloy. Acta Mater. 156, 318–329 (2018).
Ashcroft, N. & Mermin, D. Solid State Physics (Thomson Learning, 1976).
Gault, B., Moody, M. P., Cairney, J. M. & Ringer, S. P. Atom Probe Microscopy Vol. 160 (Springer, 2012).
Tsong, T. T. Field penetration and band bending for semiconductor of simple geometries in high electric-fields. Surf. Sci. 81, 1–18 (1979).
Miller, M. K. & Forbes, R. G. Atom-Probe Tomography (Springer, 2014).
Many, A., Goldstein, Y. & Grover, N. B. Semiconductor Surfaces (North-Holland, 1965).
Mönch, W. Semiconductor Surfaces and Interfaces 2nd edn (Springer, 1995).
Cerezo, A., Grovenor, C. R. M. & Smith, G. D. W. Pulsed laser atom probe analysis of GaAs and InAs. Appl. Phys. Lett. 46, 567 (1985).
Robins, E. S., Lee, M. J. G. & Langlois, P. Effect of optical diffraction on laser heating of a field emitter. Can. J. Phys. 64, 111 (1986).
Houard, J., Vella, A., Vurpillot, F. & Deconihout, B. Three-dimensional thermal response of a metal subwavelength tip under femtosecond laser illumination. Phys. Rev. B 84, 33405 (2011).
Sundaram, S. K. & Mazur, E. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses. Nat. Mater. 1, 217–224 (2002).
Tsong, T. Pulsed-laser-stimulated field ion emission from metal and semiconductor surfaces: a time-of-flight study of the formation of atomic, molecular, and cluster ions. Phys. Rev. B 30, 4946–4961 (1984).
Tsong, T. T. & Liou, Y. Cluster-ion formation in pulsed-laser-stimulated field desorption of condensed materials. Phys. Rev. B 32, 4340–4357 (1985).
Cojocaru-Mirédin, O. et al. Characterization of grain boundaries in Cu(In,Ga)Se2 films using atom-probe tomography. IEEE J. Photovolt. 1, 207–212 (2011).
Cojocaru-Mirédin, O., Choi, P., Wuerz, R. & Raabe, D. Atomic-scale distribution of impurities in CuInSe2-based thin-film solar cells. Ultramicroscopy 111, 552–556 (2011).
Blum, I. et al. Dissociation dynamics of molecular ions in high DC electric field. J. Phys. Chem. A 120, 3654–3662 (2016).
Tsong, T. T. & Cole, M. W. Dissociation of compound ions in a high electric field: atomic tunneling, orientational, and isotope effects. Phys. Rev. B 35, 66 (1987).
Forbes, R. G. Field evaporation theory: a review of basic ideas. Appl. Surf. Sci. 87–88, 1–11 (1995).
Vurpillot, F., Houard, J., Vella, A. & Deconihout, B. Thermal response of a field emitter subjected to ultra-fast laser illumination. J. Phys. D Appl. Phys. 42, 125502 (2009).
Cerezo, A., Smith, G. D. W. & Clifton, P. H. Measurement of temperature rises in the femtosecond laser pulsed three-dimensional atom probe. Appl. Phys. Lett. 88, 154103 (2006).
Sha, G., Cerezo, A. & Smith, G. D. W. Field evaporation behavior during irradiation with picosecond laser pulses. Appl. Phys. Lett. 92, 43503 (2008).
Müller, M., Gault, B., Smith, G. D. W. & Grovenor, C. R. M. Accuracy of pulsed laser atom probe tomography for compound semiconductor analysis. J. Phys. Conf. Ser. 326, 12031 (2011).
Mazumder, B., Vella, a, Deconihout, B. & Al-Kassab, T. Evaporation mechanisms of MgO in laser assisted atom probe tomography. Ultramicroscopy 111, 571–575 (2011).
Rice, K. P., Chen, Y., Prosa, T. J. & Larson, D. J. Implementing transmission electron backscatter diffraction for atom probe tomography. Microsc. Microanal. 22, 583–588 (2016).
Babinsky, K., De Kloe, R., Clemens, H. & Primig, S. A novel approach for site-specific atom probe specimen preparation by focused ion beam and transmission electron backscatter diffraction. Ultramicroscopy 144, 9–18 (2014).
Breen, A. J. et al. Correlating atom probe crystallographic measurements with transmission Kikuchi diffraction data. Microsc. Microanal. 23, 279–290 (2017).
Loberg, B. & Norden, H. Observations of the field-evaporation end form of tungsten. Ark. Fys. 39, 383–395 (1968).
Ceguerra, A. V., Breen, A. J., Cairney, J. M., Ringer, S. P. & Gorman, B. P. Integrative atom probe tomography using scanning transmission electron microscopy-centric atom placement as a step toward atomic-scale tomography. Microsc. Microanal. 27, 140–148 (2021).
Mouton, I. et al. Toward an accurate quantification in atom probe tomography reconstruction by correlative electron tomography approach on nanoporous materials. Ultramicroscopy 182, 112–117 (2017).
Arslan, I., Marquis, E. A., Homer, M., Hekmaty, M. A. & Bartelt, N. C. Towards better 3-D reconstructions by combining electron tomography and atom-probe tomography. Ultramicroscopy 108, 1579–1585 (2008).
Diercks, D. R. & Gorman, B. P. Self-consistent atom probe tomography reconstructions utilizing electron microscopy. Ultramicroscopy 195, 32–46 (2018).
Costa, G. D. et al. Advance in multi-hit detection and quantization in atom probe tomography. Rev. Sci. Instrum. 83, 123709 (2012).
Peng, Z. et al. On the detection of multiple events in atom probe tomography. Ultramicroscopy 189, 54–60 (2018).
Thuvander, M., Kvist, A., Johnson, L. J. S., Weidow, J. & Andrén, H.-O. Reduction of multiple hits in atom probe tomography. Ultramicroscopy 132, 81–85 (2013).
Meisenkothen, F., Steel, E. B., Prosa, T. J., Henry, K. T. & Prakash Kolli, R. Effects of detector dead-time on quantitative analyses involving boron and multi-hit detection events in atom probe tomography. Ultramicroscopy 159, 101–111 (2015).
La Fontaine, A. et al. Interpreting atom probe data from chromium oxide scales. Ultramicroscopy 159, 354–359 (2015).
Allegrini, F., Wimmer-Schweingruber, R. F., Wurz, P. & Bochsler, P. Determination of low-energy ion-induced electron yields from thin carbon foils. Nucl. Instrum. Methods Phys. Res. Sect. B Beam Interact. Mater. At. 211, 487–494 (2003).
Ohkubo, M., Shigetomo, S., Ukibe, M., Fujii, G. & Matsubayashi, N. Superconducting tunnel junction detectors for analytical sciences. IEEE Trans. Appl. Supercond. 24, 2400208 (2014).
Shiki, S. et al. Kinetic-energy-sensitive mass spectrometry for separation of different ions with the same m/z value. J. Mass. Spectrom. 43, 1686–1691 (2008).
Keller, H., Klingelhöfer, G. & Kankeleit, E. A position sensitive microchannelplate detector using a delay line readout anode. Nucl. Inst. Methods Phys. Res. A 258, 221–224 (1987).
Müller, E. W. Field desorption. Phys. Rev. 102, 618–624 (1956).
Gomer, R. Field-emission, field-ionization, and field desorption. Surf. Sci. 299, 129–152 (1994).
Haydock, R. & Kingham, D. R. Post-Ionization of field-evaporated Ions. Phys. Rev. Lett. 44, 1520–1523 (1980).
Forbes, R. G. Field electron and ion emission from charged surfaces: a strategic historical review of theoretical concepts. Ultramicroscopy 95, 1–18 (2003).
Neugebauer, J. & Scheffler, M. Theory of adsorption and desorption in high electric-fields. Surf. Sci. 287–288, 572–576 (1993).
Kreuzer, H. J., Wang, L. C. & Lang, N. D. Self-consistent calculation of atomic adsorption on metals in high electric-fields. Phys. Rev. B 45, 12050–12055 (1992).
McMullen, E. R. & Perdew, J. P. Theory of field evaporation of the surface layer in jellium and other metals. Phys. Rev. B 36, 2598 (1987).
Schmidt, W. A., Ernst, N. & Suchorski, Y. Local electric-fields at individual atomic surface sites—field-ion appearance energy measurements. Appl. Surf. Sci. 67, 101–110 (1993).
Zanuttini, D. et al. Electronic structure and stability of the SiO2+ dications produced in tomographic atom probe experiments. J. Chem. Phys. 147, 164301 (2017).
Zanuttini, D. et al. Dissociation of GaN2+ and AlN2+ in APT: analysis of experimental measurements. J. Chem. Phys. 149, 134311 (2018).
This Primer was a collaborative effort and, even though the authors tried to be inclusive of all perspectives on various aspects of atom probe tomography (APT) research, it reflects our experiences and some articles likely escaped our attention. Apologies to those forgotten — it was not intentional. B.G. is thankful to past and present members of the Atom Probe group at Max-Planck-Institut für Eisenforschung (MPIE) and financial support from the European Research Council (ERC) (ERC-CoG-SHINE-771602), the Max-Planck Society, the BMBF (Federal Ministry of Education and Research), the Deutsche Forschungsgemeinsschaft (DFG) including for the Leibniz Prize, the Volkswagen Stiftung, the Alexander von Humboldt Stiftung and the Engineering and Physical Sciences Research Council (EPSRC) (and some companies). J.M.C. is grateful to the Australian Research Council (ARC) for her Future Fellowship. O.C.-M. is grateful for funding from the BMWi EFFCIS II and DFG 917 Nanoswitches. T.L. thanks the DFG for financial support (project number 407513992). R.D. acknowledges NSERC (Natural Sciences and Engineering Research Council of Canada) for her doctoral postgraduate scholarship (PGS-D). P.S. is grateful for funding from the BMBF (VIP 03V0756). S.K.M. acknowledges financial support from AVH and funding from the DFG SFB-TR103 project A4. M.M. acknowledges financial support EPSRC grants EP/M022803/1 and EP/S021663/1.
The authors declare no competing interests.
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Nature Reviews Methods Primers thanks C. Cappelli, D. Perea, A. Perez-Huerta, H. Wen, J. Zimmerman and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
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APT-HDF5 file specification: https://docs.google.com/document/u/2/d/e/2PACX-1vRxcJ_xF_jiNS77CoeZdQdDXD8l2BebL-DoOBkDrAsGTrkArdjLHEMCXAifBieeS8pTO9jJ9xnstKxs/pub
APT Technical Committee: https://groups.google.com/g/atomprobe-tc?pli=1
INSPICO High Resolution Analysis: https://www.inspico.eu/Home/
Software tools for APT analysis: https://tinyurl.com/APM-SoftwareList
Steam Instruments: https://steaminstruments.com/
Atoms of a species different from the main constituent atoms, which correspond to the solvent in a mixture. Solutes, often called dopants in electronic materials, are added to modify the material’s properties.
- Microstructural imperfections
Irregularities in the arrangement of atoms in a crystal, often modifying a material’s physical properties. These include lattice defects as well as inclusions of isolated or clustered foreign atoms, second phases or particles forming in a matrix of the main constituting element (solvent).
Atoms missing from one of the crystal lattice sites forming a point defect.
Linear crystal defects typically associated with the plastic deformation of a material. There are two main types of dislocation, edge and screw. A single defect can exhibit both characteristics in different parts along the dislocation line. Mobile (glissile) and immobile (sessile) dislocations both exist. In the case of an edge dislocation, the addition of an extra half-plane of atoms in the structure results in a compressive stress on one side of the dislocation and a tensile stress on the other. Segregation of solute elements to the dislocation helps reduce the free energy associated with these defects.
- Stacking faults
Local changes in the stacking sequence of atomic layers in a crystal.
Two crystals with a defined crystallographic relationship with each other, formed typically by a cooperative displacement of atoms along a specific plane referred to as a twin boundary, which can be caused by plastic deformation. The organization of atoms on either side of the twin boundary can be such that they are mirror images of each other, or follow a specific rational twin law. Twin boundaries are often considered low-energy.
- Grain boundaries
Junctions of two crystals (most crystalline materials are made of an ensemble of individual crystals, referred to as grains). The local discontinuity of the atomic arrangement makes grain boundaries loci of interest for microstructure design. Segregation of solutes typically happens to minimize the system’s free energy, and grain boundaries assist with heterogeneous nucleation of secondary phases, for instance. The grain boundary energy depends on the magnitude of the change in orientation between the two grains as well as the crystallographic plane at the junction of the two grains.
- Secondary phases and phase boundaries
Solids formed by a mixture of species can adopt one or more thermodynamic phases, which can sometimes co-exist. The formation of such secondary phases can be hindered by the kinetics, often associated with lattice diffusion and thermal activation. The discontinuity in the crystal lattice introduced by the presence of this second phase forms a phase boundary. The difference in the lattice unit cell can make secondary phases only partially or completely incoherent with the host lattice. Often, there exists a relationship in the crystalline orientation between the matrix and the secondary phase particle.
The relative quantity of atoms of a species with respect to all atoms of all the detected species given in atomic per cent.
Here, the electrical polarity, used to represent the electric positive (+) or negative (−) sign of the electrical potential at the ends of an electrical circuit.
- Field ionization
A physical phenomenon whereby atoms or molecules can be ionized because of an intense electric field.
- Field evaporation
A physical phenomenon whereby atoms constituting a material can be removed in the form of ions because of an intense electric field.
- Projection optic
In microscopy, the transfer of the image of an object onto a surface through an optical system that can contain lenses or mirrors, for instance.
- Time-of-flight mass spectrometer
A spectrometer that exploits the proportionality of an ion’s mass to charge ratio with its time of flight from a source to a particle detector to deduce the nature of atomic or molecular ions.
An electrostatic mirror that can be flat or concave helping to correct spread in the time of flight associated with energy deficits by allowing adjustment of the ions’ flight distance proportionally to their incoming energy.
- Delay-line detector
A type of particle detector where the particle impact location on the detector’s surface is deduced from the difference in the arrival time of electrical signals at the two ends of a line, that is, a wire. Delay-line detectors typically contain two or three lines to obtain the lateral and vertical coordinates of the impact position, with the signals forming the third line used to disambiguate combinations of signals coming from multiple impacts.
- Molecular ions
Ions containing more than one atom (as opposed to atomic ions) that have, overall, lost one or more electrons. Molecular ions are usually metastable, but some are sufficiently long-lived to be detected.
- Micro-tip coupon
A support for lift-out specimen preparation, typically made of silicon processed by a reactive ion and/or chemical etching.
- Local electrode
A conical microelectrode implemented on the commercial local electrode atom probe (LEAP), positioned approximately 40 μm away from the specimen, enabling a strong localized increase in the electric field at the apex of the specimen. The implementation of such microelectrodes enabled mounting multiple specimens at once into the instrument and, then, analysis in succession.
- Mass peak ranging
The definition of the lower and higher mass to charge values of each individual mass peak in the mass spectrum to associate the mass to charge with one element or a combination of atoms from one or multiple elements.
- Image compression
An atom probe-specific term describing the angular compression associated with the ion projection; that is, the ratio of the crystallographic angle to the imaged angle.
- Quasi-stereographic projection
A model of point projection of a sphere onto a plane, which is bijective and preserves angles but neither distances nor areas. The standard projection has the projection point and the projection plane diametrically opposed. In a quasi-stereographic projection, this is not necessarily the case.
In an atom probe, the conversion of the three-dimensional point cloud into an array or grid of volumetric elements containing a certain number of atoms of a certain size. Following voxelization, the number of atoms of each defined species can be used to calculate a local composition, and is usually subject to a smoothing process termed delocalization.
A three-dimensional surface representing points of a given threshold value of composition, concentration or density within the 3D point cloud. The iso-surface is built from the grid of voxels and, hence, subject to the delocalization.
The concentration is a quantity per unit volume expressed in atoms per cubic nanometre, for instance, equivalent to a density. Owing to trajectory aberrations and reconstruction issues, volume estimations from reconstructed atom probe data are typically not precise.
- Interfacial excess
The number of excess atoms of a certain species per unit area of an interface.
- Round robin experiments
A set of interlaboratory measurements independently performed that allows for direct comparison of analyses and results, and that can help guide establishing best practice.
- Rayleigh criterion
The shortest distance below which the diffraction-limited image of two point sources can no longer be separated.
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Gault, B., Chiaramonti, A., Cojocaru-Mirédin, O. et al. Atom probe tomography. Nat Rev Methods Primers 1, 51 (2021). https://doi.org/10.1038/s43586-021-00047-w
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