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References
Jagannathan, H. et al. Vertical-transport nanosheet technology for CMOS scaling beyond lateral-transport devices. In 2021 IEEE International Electron Devices Meeting (IEEE, 2021).
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Ball, P. Semiconductor technology looks up. Nat. Mater. 21, 132 (2022). https://doi.org/10.1038/s41563-021-01192-z
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DOI: https://doi.org/10.1038/s41563-021-01192-z
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