Integrating graphene into semiconductor fabrication lines

Electronic and photonic devices based on graphene have unique properties, leading to outstanding performance figures of merit. Mastering the integration of this unconventional material into an established semiconductor fabrication line represents a critical step towards commercialization.

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Fig. 1: Applications for two-dimensional materials.
Fig. 2: Flow chart for BEOL integration.

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Acknowledgements

All authors acknowledge funding from the European Union H2020 Graphene Flagship project (grant agreement no. 785219).

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All authors conceived this work and collaborated equally in the writing of the text.

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Correspondence to Daniel Neumaier.

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Neumaier, D., Pindl, S. & Lemme, M.C. Integrating graphene into semiconductor fabrication lines. Nat. Mater. 18, 525–529 (2019). https://doi.org/10.1038/s41563-019-0359-7

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