Chemically etched ultrahigh-Q wedge-resonator on a silicon chip

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Abstract

Ultrahigh-Q optical resonators are being studied across a wide range of fields, including quantum information, nonlinear optics, cavity optomechanics and telecommunications1,2,3,4,5,6,7. Here, we demonstrate a new resonator with a record Q-factor of 875 million for on-chip devices. The fabrication of our device avoids the requirement for a specialized processing step, which in microtoroid resonators8 has made it difficult to control their size and achieve millimetre- and centimetre-scale diameters. Attaining these sizes is important in applications such as microcombs and potentially also in rotation sensing. As an application of size control, stimulated Brillouin lasers incorporating our device are demonstrated. The resonators not only set a new benchmark for the Q-factor on a chip, but also provide, for the first time, full compatibility of this important device class with conventional semiconductor processing. This feature will greatly expand the range of possible ‘system on a chip’ functions enabled by ultrahigh-Q devices.

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Figure 1: Micrographs and mode renderings of the wedge-resonator from top and side views.
Figure 2: Data showing measured Q-factor plotted versus resonator diameter with oxide thickness as a parameter.
Figure 3: Plot of measured FSR versus target design-value resonator diameter on a lithographic mask.
Figure 4: Illustration of tuning control of the SBL devices.
Figure 5: Data plot showing effect of etch time on appearance of the ‘foot’ region in etching of a 10-μm-thick silica layer.

References

  1. 1

    Vahala, K. J. Optical microcavities. Nature 424, 839–846 (2003).

  2. 2

    Kippenberg, T. J. & Vahala, K. J. Cavity optomechanics: back-action at the mesoscale. Science 321, 1172–1176 (2008).

  3. 3

    Kippenberg, T. J. & Vahala, K. J. Cavity opto-mechanics. Opt. Express 15, 17172–17205 (2007).

  4. 4

    Matsko, A. B. & Ilchenko, V. S. Optical resonators with whispering-gallery modes-part I: basics. IEEE J. Sel. Top. Quant. Electron. 12, 3–14 (2006).

  5. 5

    Ilchenko, V. S. & Matsko, A. B. Optical resonators with whispering-gallery modes-part II: applications. IEEE J. Sel. Top. Quant. Electron. 12, 15–32 (2006).

  6. 6

    Kippenberg, T. J., Holzwarth, R. & Diddams, S. A. Microresonator-based optical frequency combs. Science 332, 555–559 (2011).

  7. 7

    Aoki, T. et al. Observation of strong coupling between one atom and a monolithic microresonator. Nature 442, 671–674 (2006).

  8. 8

    Armani, D. K., Kippenberg, T. J., Spillane, S. M. & Vahala, K. J. Ultra-high-Q toroid microcavity on a chip. Nature 421, 925–929 (2003).

  9. 9

    Grudinin, I. S., Matsko, A. B. & Maleki, L. On the fundamental limits of Q-factor of crystalline dielectric resonators. Opt. Express 15, 3390–3395 (2007).

  10. 10

    Grudinin, I. S., Ilchenko, V. S. & Maleki, L. Ultrahigh optical Q-factors of crystalline resonators in the linear regime. Phys. Rev. A 74, 063806 (2006).

  11. 11

    Savchenkov, A. A., Matsko, A. B., Ilchenko, V. S. & Maleki, L. Optical resonators with ten million finesse. Opt. Express 15, 6768–6773 (2007).

  12. 12

    Tomes, M. & Carmon, T. Photonic micro-electromechanical systems vibrating at X-band (11-GHz) rates. Phys. Rev. Lett. 102, 113601 (2009).

  13. 13

    Grudinin, I. S., Yu, N. & Maleki, L. Brillouin lasing with a CaF2 whispering gallery mode resonator. Phys. Rev. Lett. 102, 043902 (2009).

  14. 14

    Pant, R. et al. Cavity enhanced stimulated Brillouin scattering in an optical chip for multiorder Stokes generation. Opt. Lett. 36, 3687–3689 (2011).

  15. 15

    Kippenberg, T. J., Kalkman, J., Polman, A. & Vahala, K. J. Demonstration of an erbium-doped microdisk laser on a silicon chip. Phys. Rev. A 74, 051802 (2006).

  16. 16

    Cai, M., Painter, O. J. & Vahala, K. J. Observation of critical coupling in a fiber taper to silica-microsphere whispering gallery mode system. Phys. Rev. Lett. 74, 051802 (2006).

  17. 17

    Spillane, S. M., Kippenberg, T. J., Painter, O. J. & Vahala, K. J. Ideality in a fiber-taper-coupled microresonator system for application to cavity quantum electrodynamics. Phys. Rev. Lett. 91, 043902 (2003).

  18. 18

    Vernooy, D. W., Ilchenko, V. S., Mabuchi, H., Streed, E. W. & Kimble, H. J. High-Q measurements of fused-silica microspheres in the near infrared. Opt. Lett. 23, 247–249 (1998).

  19. 19

    Smith, S. P., Zarinetchi, F. & Ezekiel, S. Narrow-linewidth stimulated Brillouin fiber laser and applications. Opt. Lett. 16, 393–395 (1991).

  20. 20

    Okawachi, Y. et al. Tunable all-optical delays via Brillouin slow light in an optical fiber. Phys. Rev. Lett. 94, 153902 (2005).

  21. 21

    Zhu, Z., Dawes, A., Gauthier, D., Zhang, L. & Willner, A. Broadband SBS slow light in an optical fiber. J. Lightwave Technol. 25, 201–206 (2007).

  22. 22

    Zhu, Z., Gauthier, D. & Boyd, R. Stored light in an optical fiber via stimulated Brillouin scattering. Science 318, 1748–1750 (2007).

  23. 23

    Hänsch, T. & Couillaud, B. Laser frequency stabilization by polarization spectroscopy of a reflecting reference cavity. Opt. Commun. 35, 441–444 (1980).

  24. 24

    Schliesser, A., Riviere, R., Anetsberger, G., Arcizet, O. & Kippenberg, T. J. Resolved-sideband cooling of a micromechanical oscillator. Nature Phys. 4, 415–419 (2008).

  25. 25

    Tkach, R. W., Chraplyvy, A. R. & Derosier, R. M. Spontaneous Brillouin scattering for single-mode optical-fibre characterisation. Electron. Lett. 22, 1011–1013 (1986).

  26. 26

    Del'Haye, P., Arcizet, O., Schliesser, A., Holzwarth, R. & Kippenberg, T. J. Full stabilization of a microresonator frequency comb. Phys. Rev. Lett. 101, 053903 (2008).

  27. 27

    Kippenberg, T. J., Spillane, S. M. & Vahala, K. J. Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity. Phys. Rev. Lett. 93, 083904 (2004).

  28. 28

    Ciminelli, C., Dell'Olio, F., Campanella, C. & Armenise, M. Photonic technologies for angular velocity sensing. Adv. Opt. Photon. 2, 370–404 (2010).

  29. 29

    Matsko, A. B., Savchenkov, A. A., Yu, N. & Maleki, L. Whispering-gallery-mode resonators as frequency references. I. Fundamental limitations. J. Opt. Soc. Am. B 24, 1324–1335 (2007).

  30. 30

    Savchenkov, A. A., Matsko, A. B., Ilchenko, V. S., Yu, N. & Maleki, L. Whispering-gallery-mode resonators as frequency references. II. Stabilization. J. Opt. Soc. Am. B 24, 2988–2997 (2007).

  31. 31

    Gorodetsky, M. L. & Grudinin, I. S. Fundamental thermal fluctuations in microspheres. J. Opt. Soc. Am. B 21, 697–705 (2004).

  32. 32

    Anetsberger, G., Riviére, R., Schliesser, A., Arcizet, O. & Kippenberg, T. J. Demonstration of ultra low dissipation optomechanical resonators on a chip. Nature Photon. 2, 627–633 (2008).

  33. 33

    Tien, M. C. et al. Ultra-high quality factor planar Si3N4 ring resonators on Si substrates. Opt. Express 19, 13551–13556 (2011).

  34. 34

    Ciminelli, C., Passaro, V., Dell'Olio, F. & Armenise, M. Three-dimensional modelling of scattering loss in InGaAsP/InP and silica-on-silicon bent waveguides. J. Eur. Opt. Soc. Rapid Publ. 4, 1–6 (2009).

  35. 35

    Barwicz, T. & Haus, H. Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides. J. Lightwave Technol. 23, 2719–2732 (2005).

  36. 36

    Payne, F. & Lacey, J. A theoretical analysis of scattering loss from planar optical waveguides. Opt. Quantum. Electron. 26, 977–986 (1994).

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Acknowledgements

The authors acknowledge support from the Defense Advanced Research Projects Agency under the iPhoD and Orchid programmes and also the Kavli Nanoscience Institute at Caltech. H.L. acknowledges support from the Center for the Physics of Information, and S.J. thanks the Kwanjeong Educational Foundation.

Author information

All authors made important contributions. H.L., T.C. and J.L. performed measurements and modelling, and contributed equally to the work. H.L. performed microfabrication of devices with assistance from T.C. and K.Y. AFM measurements were performed by H.L. and S.J. The experiments were conceived, designed and planned by H.L., T.C., J.L., O.P. and K.J.V. All authors helped to write the manuscript.

Correspondence to Kerry J. Vahala.

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The authors declare no competing financial interests.

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Lee, H., Chen, T., Li, J. et al. Chemically etched ultrahigh-Q wedge-resonator on a silicon chip. Nature Photon 6, 369–373 (2012) doi:10.1038/nphoton.2012.109

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