Improvements in interferometry have made it a powerful and attractive technique for characterizing tiny devices based on microelectromechanical systems.
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Conroy, M., Mansfield, D. Measuring microscale devices. Nature Photon 2, 661–663 (2008). https://doi.org/10.1038/nphoton.2008.216
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DOI: https://doi.org/10.1038/nphoton.2008.216
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