Efforts to adapt and extend graphic arts printing techniques for demanding device applications in electronics, biotechnology and microelectromechanical systems have grown rapidly in recent years. Here, we describe the use of electrohydrodynamically induced fluid flows through fine microcapillary nozzles for jet printing of patterns and functional devices with submicrometre resolution. Key aspects of the physics of this approach, which has some features in common with related but comparatively low-resolution techniques for graphic arts, are revealed through direct high-speed imaging of the droplet formation processes. Printing of complex patterns of inks, ranging from insulating and conducting polymers, to solution suspensions of silicon nanoparticles and rods, to single-walled carbon nanotubes, using integrated computer-controlled printer systems illustrates some of the capabilities. High-resolution printed metal interconnects, electrodes and probing pads for representative circuit patterns and functional transistors with critical dimensions as small as 1 μm demonstrate potential applications in printed electronics.
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Forrest, S. R. The path to ubiquitous and low-cost organic electronic applications on plastics. Nature 428, 911–918 (2004).
Gans, B. J., Duineveld, P. C. & Schubert, U. S. Inkjet printing of polymers: State of the art and future development. Adv. Mater. 16, 203–213 (2004).
Parashkov, R., Becker, E., Riedl, T., Johannes, H. & Kowalsky, W. Large area electronics using printing method. Proc. IEEE 93, 1321–1329 (2005).
Chang, P. C. et al. Film morphology and thin film transistor performance of solution-processed oligothiophenes. Chem. Mater. 16, 4783–4789 (2004).
Sirringhaus, H. et al. High-resolution inkjet printing of all-polymer transistor circuits. Science 290, 2123–2126 (2000).
Shimoda, T. et al. Solution-processed silicon films and transistors. Nature 440, 783–786 (2006).
Burns, S. E., Cain, P., Mills, J., Wang, J. & Sirringhaus, H. Inkjet printing of polymer thin-film transistor circuits. Mater. Res. Soc. Bull. 28, 829–834 (2003).
Wong, W. S., Ready, S. E., Lu, J. P. & Street, R. A. Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography. IEEE Electron Device Lett. 24, 577–579 (2003).
Szczech, J. B., Megaridis, C. M., Gamota, D. R. & Zhang, J. Fine-line conductor manufacturing using drop-on-demand PZT printing technology. IEEE Trans. Electron. Packag. Manufactur. 25, 26–33 (2002).
Shimoda, T., Morii, K., Seki, S. & Kiguchi, H. Inkjet printing of light-emitting polymer displays. Mater. Res. Soc. Bull. 28, 821–827 (2003).
Chang, S. C. et al. Multicolor organic light-emitting diodes processed by hybrid inkjet printing. Adv. Mater. 11, 734–737 (1999).
Hebner, T. R. & Sturm, J. C. Local tuning of organic light-emitting diode color by dye droplet application. Appl. Phys. Lett. 73, 1775–1777 (1998).
Lemmo, A. V., Rose, D. J. & Tisone, T. C. Inkjet dispensing technology: Application in drug discovery. Curr. Opin. Biotechnol. 9, 615–617 (1998).
Heller, M. J. DNA microarray technology: Devices, systems, and applications. Annu. Rev. Biomed. Eng. 4, 129–153 (2002).
Nallani, A., Chen, T., Lee, J. B., Hayes, D. & Wallace, D. Wafer level optoelectronic device packaging using MEMS. Proc. SPIE: Smart Sensors Actuators MEMS II 5836, 116–127 (2005).
Bietsch, A., Zhang, J., Hegner, M., Lang, H. P. & Gerber, C. Rapid functionalization of cantilever array sensors by inkjet printing. Nanotechnology 15, 873–880 (2004).
Hiller, J., Mendelsohn, J. D. & Rubner, M. F. Reversibly erasable nanoporous anti-reflection coatings from polyelectrolyte multilayers. Nature Mater. 1, 59–63 (2002).
Ling, M. M. & Bao, Z. Thin film deposition, patterning, and printing in organic thin film transistors. Chem. Mater. 16, 4824–4840 (2004).
Calvert, P. Inkjet printing for materials and devices. Chem. Mater. 13, 3299–3305 (2001).
Sanaur, S., Whalley, A., Alameddine, B., Carnes, M. & Nuckolls, C. Jet-printed electrodes and semiconducting oligomers for elaboration of organic thin-film transistors. Org. Electron. 7, 423–427 (2006).
Cheng, K. et al. Inkjet printing, self-assembled polyelectrolytes, and electroless plating: Low cost fabrication of circuits on a flexible substrate at room temperature. Macromol. Rapid Commun. 26, 247–264 (2005).
Creagh, L. T. & McDonald, M. Design and performance of inkjet printheads for non graphic arts applications. Mater. Res. Soc. Bull. 28, 807 (2003).
Wang, J. Z., Gu, J., Zenhausern, F. & Sirringhaus, H. Low-cost fabrication of submicron all polymer field effect transistors. Appl. Phys. Lett. 88, 133502 (2006).
Stutzmann, N., Friend, R. H. & Sirringhaus, H. Self-aligned, vertical channel, polymer field effect transistors. Science 299, 1881–1885 (2003).
Sele, C. W., Werne, T., Friend, R. H. & Sirringhaus, H. Lithography-free, self-aligned inkjet printing with sub-hundred nanometer resolution. Adv. Mater. 17, 997–1001 (2005).
Mills, R. S. Recent Progress in Ink Jet Technologies II 286–290 (Society for Imaging Science and Technology, Washington, 1999).
Nakao, H., Murakami, T., Hirahara, S., Nagato, H. & Nomura, Y. IS&Ts NIP15: 1999 International Conference on Digital Printing Technologies 319–322 (Society for Imaging Science and Technology, Washington, 1999).
Choi, D. H. & Lee, F. C. Proc. of IS&T’s Ninth International Congress on Advances in Non-Impact Printing Technologies. October 4–8, Yokohama, Japan (Society for Imaging Science and Technology, Washington, 1993).
Kawamoto, H., Umezu, S. & Koizumi, R. Fundamental investigation on electrostatic ink jet phenomena in pin-to-plate discharge system. J. Imaging Sci. Technol. 49, 19–27 (2005).
Taylor, G. Disintegration of water droplets in an electric field. Proc. R. Soc. Lond. A 280, 383–397 (1964).
Jayasinghe, S. N. & Edirisinghe, M. J. Electric-field driven jetting from dielectric liquids. Appl. Phys. Lett. 85, 4243 (2004).
Marginean, I., Parvin, L., Heffernan, L. & Vertes, A. Flexing the electrified meniscus: The birth of a jet in electrosprays. Anal. Chem. 76, 4202–4207 (2004).
Chen, C. H., Saville, D. A. & Aksay, I. A. Scaling law for pulsed electrohydrodynamic drop formation. Appl. Phys. Lett. 89, 124103 (2006).
Hayati, I., Bailey, A. I. & Tadros, T. F. Investigations into mechanisms of electrohydrodynamic spraying of liquids. J. Colloid Interface Sci. 117, 205–221 (1987).
Wickware, P. & Smaglik, P. Mass spectroscopy: Mix and match. Nature 413, 869 (2001).
Salata, O. V. Tools of nanotechnology: Electrospray. Curr. Nanosci. 1, 25–33 (2005).
Smith, A. et al. Observation of strong direct-like oscillator strength in the photoluminescence of Si nanoparticles. Phys. Rev. B 72, 205307 (2005).
Menard, E., Lee, K. J., Khang, D. Y., Nuzzo, R. G. & Rogers, J. A. A printable form of silicon for high performance thin film transistors on plastic substrates. Appl. Phys. Lett. 84, 5398 (2004).
Kocabas, C., Shim, M. & Rogers, J. A. Spatially selective guided growth of high-coverage arrays and random networks of single-walled carbon nanotubes and their integration into electronic devices. J. Am. Chem. Soc. 128, 4540–4541 (2006).
Park, J. U. et al. In situ deposition and patterning of single walled carbon nanotubes by laminar flow and controlled flocculation in microfluidic channels. Angew. Chem. Int. Edn 45, 581–585 (2006).
Kang, S. J. et al. High performance electronics using dense, perfectly aligned arrays of single walled carbon nanotubes. Nature Nanotechnol. 2, 230–236 (2007).
Chen, Z., Appenzeller, J., Knoch, J., Lin, Y. M. & Avouris, P. The role of metal-nanotube contact in the performance of carbon nanotube field effect transistors. Nano Lett. 5, 1497–1502 (2005).
Kim, W. et al. Electrical contacts to carbon nanotubes down to 1 nm in diameter. Appl. Phys. Lett. 87, 173101 (2005).
Lee, K. J. et al. A printable form of single-crystalline gallium nitride for flexible optoelectronic systems. Small 1, 1164–1168 (2005).
Sheats, J. R. Manufacturing and commercialization issues in organic electronics. J. Mater. Res. 19, 1974–1989 (2004).
The authors thank L. Jang and M. Nayfeh for supplying Si nanoparticle solutions, R. Shepherd and J. Lewis for the use of their high-speed camera, and R. Lin for assistance with setting initial experimental conditions. In addition, the authors acknowledge the Center for Nanoscale Chemical Electrical Mechanical Manufacturing Systems in the University of Illinois, which is funded by the National Science Foundation under grant DMI-0328162, and the Center for Microanalysis of Materials in University of Illinois, which is partially supported by the US Department of Energy under grant DEFG02-91-ER45439.
The authors declare no competing financial interests.
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Park, JU., Hardy, M., Kang, S. et al. High-resolution electrohydrodynamic jet printing. Nature Mater 6, 782–789 (2007). https://doi.org/10.1038/nmat1974
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