The use of direct laser photolithography for creating complex three-dimensional structures in photocurable polymer resist has great potential for the construction of micromechanical and photonic devices. A new study pushes this technique towards its limits to explore just how far its potential might reach.
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Lourtioz, JM. Writing 3D photonic structures with light. Nature Mater 3, 427–428 (2004). https://doi.org/10.1038/nmat1167
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DOI: https://doi.org/10.1038/nmat1167
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Transition of refractive index contrast in course of grating growth
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