Article abstract

Nature Photonics 2, 52 - 56 (2008)
Published online: 16 December 2007 | doi:10.1038/nphoton.2007.252

Subject Category: Novel materials and engineered structures

Embedded cavities and waveguides in three-dimensional silicon photonic crystals

Stephanie A. Rinne1,2, Florencio García-Santamaría1,2 & Paul V. Braun1

To fulfil the promise that complete-photonic-bandgap materials hold for optoelectronics applications, the incorporation of three-dimensionally engineered defects must be realized. Previous attempts to create and characterize such defects were limited because of fabrication challenges. Here we report the optical and structural characterization of complex submicrometre features of unprecedented quality within silicon inverse opals. High-resolution three-dimensional features are first formed within a silica colloidal crystal by means of two-photon polymerization, followed by a high-index replication step and removal of the opal template to yield embedded defects in three-dimensional silicon photonic crystals. We demonstrate the coupling of bandgap frequencies to resonant modes in planar optical cavities and the first waveguiding of near-infrared light around sharp bends in a complete-photonic-bandgap material.

  1. Department of Materials Science and Engineering, Beckman Institute, and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA
  2. These authors contributed equally to this work.

Correspondence to: Paul V. Braun1 e-mail:


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