Letter abstract
Nature Nanotechnology 4, 292 - 296 (2009)
Published online: 15 March 2009 | Corrected online: 31 March 2009 | doi:10.1038/nnano.2009.37
Subject Categories: Electronic properties and devices | Synthesis and processing
Nanotubular metal–insulator–metal capacitor arrays for energy storage
Parag Banerjee1,2, Israel Perez1,2, Laurent Henn-Lecordier1,2, Sang Bok Lee3,4 & Gary W. Rubloff1,2,5
Abstract
Nanostructured devices have the potential to serve as the basis for next-generation energy systems that make use of densely packed interfaces and thin films1. One approach to making such devices is to build multilayer structures of large area inside the open volume of a nanostructured template. Here, we report the use of atomic layer deposition to fabricate arrays of metal–insulator–metal nanocapacitors in anodic aluminium oxide nanopores. These highly regular arrays have a capacitance per unit planar area of 
10 
F cm-2 for 1-m-thick anodic aluminium oxide and 100 F cm-2 for 10-m-thick anodic aluminium oxide, significantly exceeding previously reported values for metal–insulator–metal capacitors in porous templates2, 3, 4, 5, 6. It should be possible to scale devices fabricated with this approach to make viable energy storage systems that provide both high energy density and high power density.
- Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, USA
- Institute for Systems Research, University of Maryland, College Park, Maryland 20742, USA
- Department of Chemistry and Biochemistry, University of Maryland, College Park, Maryland 20742, USA
- Department of Nanoscience and Technology, Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon 305-701, Korea
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742, USA
Correspondence to: Sang Bok Lee3,4 e-mail: slee@umd.edu
Correspondence to: Gary W. Rubloff1,2,5 e-mail: rubloff@umd.edu
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