Thermochemical lithography is able to produce features just 28 nanometres wide on polymer surfaces.
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Basu, A., Gianchandani, Y. Surfaces feel the heat. Nature Nanotech 4, 622–623 (2009). https://doi.org/10.1038/nnano.2009.287
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DOI: https://doi.org/10.1038/nnano.2009.287