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News Feature
Nature 431, 622-623 (7 October 2004) | doi:10.1038/431622a; Published online 6 October 2004
Semiconductor industry: Chipping in
Geoff Brumfiel1
- Geoff Brumfiel is Nature's Washington physical sciences correspondent.
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Abstract
The production of silicon chips is big business, but with success have come environmental concerns. Geoff Brumfiel meets the people helping the industry to clean up its act.
On the face of it, there is nothing cleaner than a semiconductor manufacturing plant. Dust inside is kept to a few particles per cubic metre to prevent it from clogging up the microcircuits as they are assembled.
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