Micromachines can be created with higher resolution using two-photon absorption.
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References
Maruo, S., Nakamura, O. & Kawata, S. Opt. Lett . 22, 132–134 (1997).
Sun, H.-B, Matsuo, S. & Misawa, H. Appl. Phys. Lett. 74, 786–788 (1999).
Cumpston, B. H. et al. Nature 398, 51–54 (1999).
Sun, H.-B et al. Appl. Phys. Lett. 79, 1–3 (2001).
Maruo, S. & Kawata, S. IEEE J. Microelectromech. Syst. 7, 411–415 (1998).
Sun, H.-B et al. Opt. Lett. 25, 1110–1112 (2000).
Parthenopoulos, D. A. & Rentzepis, P. M. Science 245, 843–845 (1989).
Denk, W., Strickler, J. H. & Webb, W. W. Science 248, 73–76 (1990).
Wu, E. S., Strickler, J. H., Harrell, W. R. & Webb W. W. Proc. SPIE 1674, 776–782 (1992).
Flory, P. J. Principals of Polymer Chemistry (Cornell Univ. Press, New York, 1952).
Ashkin, A. Phys. Rev. Lett. 24, 156–159 (1970).
Inouye, Y., Shoji, S., Furukawa, H., Nakamura, O. & Kawata, S. Jpn J. Appl. Phys. 37, L684–L686 (1998).
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Kawata, S., Sun, HB., Tanaka, T. et al. Finer features for functional microdevices. Nature 412, 697–698 (2001). https://doi.org/10.1038/35089130
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DOI: https://doi.org/10.1038/35089130
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