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Nanoelectronics

The strain of it all

Nature Nanotechnology volume 3, pages 381–382 (2008)Cite this article

Electron interferometry can be used to measure strain with nanoscale resolution in electronic devices by exploiting a simple idea found in physics textbooks.

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Figure 1: In the standard moiré technique (top left) the samples (A and B) are placed on top of each other and the interference fringes are recorded.

References

  1. Hÿtch, M., Houdellier, F., Hude, F. & Snoeck, E. Nature 453, 1086–1089 (2008).

    Article  Google Scholar 

  2. Patorski, K. & Kujawinska, M. Handbook of the Moiré Fringe Technique (Elsevier, Amsterdam, 1993).

    Google Scholar 

  3. Hirsch, P., Howie, A., Nicholson, R., Pashley, D. W. & Whelan, M. J. Electron Microscopy of Thin Crystals (Krieger, Malabar, Florida, 1977).

    Google Scholar 

  4. Möllenstedt, G. & Düker, H. Z. für Physik A 145, 377–397 (1956).

    Article  Google Scholar 

  5. Treacy, M. M. J. & Gibson, J. M. J. Vac. Sci. Technol. B 4, 1458–1466 (1986).

    Article  CAS  Google Scholar 

Download references

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Authors and Affiliations

  1. Abbas Ourmazd is in the Department of Physics, University of Wisconsin Milwaukee, Wisconsin 53211, USA. ourmazd@uwm.edu,

    Abbas Ourmazd

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  1. Abbas Ourmazd
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Ourmazd, A. The strain of it all. Nature Nanotech 3, 381–382 (2008). https://doi.org/10.1038/nnano.2008.195

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  • DOI: https://doi.org/10.1038/nnano.2008.195

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