Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

  • News & Views
  • Published:

Semiconductor technology

Imprints offer Moore

The cost of making chip components smaller using photolithographic printing might soon invalidate Moore's law. A new imprinting technique that can reproduce features as small as 10 nm could save it.

This is a preview of subscription content, access via your institution

Relevant articles

Open Access articles citing this article.

Access options

Buy this article

Prices may be subject to local taxes which are calculated during checkout

Figure 1: A new recipe for silicon chips?

References

  1. Moore, G. E. Electronics 38, 19 April (1965); http://www.intel.com/research/silicon/moorespaper.pdf

  2. Moore, G. E. Wired 5.05 (1997).

  3. Chou, S. Y., Keimel, C. & Gu, J. Nature 417, 835–837 (2002).

    Article  ADS  CAS  Google Scholar 

  4. Chou, S. Y., Krauss, P. R. & Renstrom, P. S. Science 272, 85–87 (1996).

    Article  ADS  CAS  Google Scholar 

  5. Xia, Y. & Whitesides, G. Annu. Rev. Mater. Sci. 28, 153–184 (1998).

    Article  ADS  CAS  Google Scholar 

  6. Resnik, D. J. et al. in Emerging Lithographic Technologies VI (ed. Engelstad, R. L.) Proc. SPIE 4688 (in the press).

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to R. Fabian Pease.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Pease, R. Imprints offer Moore. Nature 417, 802–803 (2002). https://doi.org/10.1038/417802a

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1038/417802a

This article is cited by

Search

Quick links

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing