Abstract
THE density of thin metal films deposited from vapour has been determined by several investigators1–6. There is contradictory evidence on film densities in that some studies have shown film densities to be lower than that of bulk metal1,2 whereas others have shown no such difference3–6. We have determined the density of vapour-deposited copper films in the thickness range 960–4000 Å using X-ray absorption measurements. Up to now this method has not been reported in the literature.
This is a preview of subscription content, access via your institution
Access options
Subscribe to this journal
Receive 51 print issues and online access
$199.00 per year
only $3.90 per issue
Buy this article
- Purchase on SpringerLink
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Similar content being viewed by others
References
Blois, M. S., and Rieser, L. M., J. Appl. Phys., 25, 338 (1954).
Hartman, T. E., J. Vac. Sci. Tech., 2, 239 (1965).
Edgecombe, J., J. Vac. Sci. Tech., 3, 28 (1966).
Wainfan, N., Scott, N. J., and Parratt, L. G., J. Appl. Phys., 30, 1604 (1959).
Wolter, A. R., J. Appl. Phys., 36, 2377 (1965).
Lovell, S., and Rollinson, E., Nature, 218, 1179 (1968).
Tolansky, S., Multiple Beam Interferometry (Clarendon Press, Oxford, 1948).
Cullity, B. D., Elements of X-Ray Diffraction (Addison-Wesley, Mass., 1956).
Bauer, R. W., Schwartzman, A. M., and D'Antonio, C., Thin Solid Films (in the press).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
WEINSTEIN, A., D'ANTONIO, C. & MUKHERJEE, K. Density of Copper Thin Films measured by X-ray Absorption. Nature 220, 777–778 (1968). https://doi.org/10.1038/220777a0
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1038/220777a0
Comments
By submitting a comment you agree to abide by our Terms and Community Guidelines. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate.