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New Method of Thickness Measurement with the Interference Microscope

Abstract

THE optical path difference (OPD) between an object and the surrounding medium, as measured with a transmission interference microscope using axial illumination, is given by where T is the thickness of the object, and μ0 and μm are the refractive indices of the object and medium, respectively.

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References

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GOLDSTEIN, D. New Method of Thickness Measurement with the Interference Microscope. Nature 213, 386–387 (1967). https://doi.org/10.1038/213386a0

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  • DOI: https://doi.org/10.1038/213386a0

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