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Examination of Surfaces by scanning with Charged Particles

Abstract

A STUDY of the distribution of elements in inhomogeneous samples has assisted many chemical and metallurgical investigations, and in particular the electron probe microanalyser has proved a valuable tool for examining small areas at high resolution. In certain cases, however, a less costly analytical instrument of lower resolution is required for scanning larger areas, and for this purpose an X-ray milliprobe analyser has been designed, using a collimated beam of X-rays 1 mm in diameter1.

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References

  1. Garton, F. W., Campbell, J. T., and Watling, J., Proc. Soc. Anal. Chem. Conf., Nottingham, (1965).

  2. Pierce, T. B., and Peck, P. F., Proc. Soc. Anal. Chem. Conf., Nottingham, (1965).

  3. Morgan, I. L., Proc. Euratom Meet. Practical Aspects of Activation Analysis with Charged Particles, Grenoble, (1965).

  4. Pierce, T. B., Proc. Euratom Meet. Practical Aspects of Activation Analysis with Charged Particles, Grenoble, (1965).

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PIERCE, T., PECK, P. & CUFF, D. Examination of Surfaces by scanning with Charged Particles. Nature 211, 66–67 (1966). https://doi.org/10.1038/211066a0

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