MEMS: high-quality factor sensors for resonator gyroscopes

A disk resonator gyroscope demonstrates a high-quality factor of 510 k and decay time constant of 74.9 s

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This Special Topic addresses the second of these challenges, by examining the state of “nanomanufacturing”, reviewing a commercial success in the field, and introducing processes that have promise for mass production.

Eric M. Yeatman, Hannah M. Gramling and Evelyn N. Wang

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