Carbon MEMS in Microsystems & Nanoengineering
This special issue on carbon micro and nano fabrication is a testament to the field having reached a level of maturity that sets it apart not only from Si microfabrication but also from efforts in CNT, graphene and fullerenes. By judicious choice of polymer precursors and pyrolysis steps, predetermined shapes and controlled microstructure of the resulting carbon devices are now possible. This field represents a holistic approach to carbon micro- and nanofabrication that, depending on the application at hand, yields the desired carbon shape and microstructure and thus the desired functionality in terms of chemical, electrical, thermal or mechanical properties. (Written by Marc Madou）
