# Table 1 Beam vertical size and wire resolution

5 μm W 2 μm Au 1 μm Au
Resolution (nm) 1250 600 300
σrms (nm) 1967 ± 16 890 ± 2 449 ± 32
σy (nm) 462 ± 11 491 ± 4 491 ± 5
1. The first row shows the wire resolution. σrms is the average rms size of three measured beam profiles, with its standard deviation. σy is the mean value of the reconstructed beam size obtained by fitting convoluted Gaussian distributions to the measurements, with its standard deviation