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2D materials can unlock single-crystal-based monolithic 3D integration

Nature Electronics volume 7, pages 416–418 (2024)Cite this article

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Two-dimensional (2D) semiconductors could be used to build advanced 3D chips based on monolithic 3D integration. But challenges related to growing single-crystalline materials at low temperatures — as well as enhancing the performance of 2D transistors — need to be addressed first.

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Fig. 1: Progress in M3D integration.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA

    Kuangye Lu, Ki Seok Kim & Jeehwan Kim

  2. Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA

    Kuangye Lu, Ki Seok Kim & Jeehwan Kim

  3. 2D Device Laboratory, Samsung Advanced Institute of Technology, Suwon, Korea

    Jaewoo Shim & Sang Won Kim

  4. Device Research Center, Samsung Advanced Institute of Technology, Suwon, Korea

    Jaewoo Shim & Sang Won Kim

  5. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA

    Jeehwan Kim

Authors
  1. Kuangye Lu
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  2. Jaewoo Shim
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  3. Ki Seok Kim
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  4. Sang Won Kim
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  5. Jeehwan Kim
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Corresponding authors

Correspondence to Ki Seok Kim, Sang Won Kim or Jeehwan Kim.

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Lu, K., Shim, J., Kim, K.S. et al. 2D materials can unlock single-crystal-based monolithic 3D integration. Nat Electron 7, 416–418 (2024). https://doi.org/10.1038/s41928-024-01190-4

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