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A metallized silicon nitride membrane for clean 2D heterostructure assembly

A polymer-free method for stacking 2D materials has been demonstrated, using a cantilevered transfer support made from metallized silicon nitride. The assembly process, which is compatible with ultrahigh-vacuum operation, results in atomically clean and uniform interfaces.

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Fig. 1: Transfer of micrometre-scale crystals in UHV using an inorganic cantilever support.


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This is a summary of: Wang, W. et al. Clean assembly of van der Waals heterostructures using silicon nitride membranes. Nat. Electron. (2023).

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A metallized silicon nitride membrane for clean 2D heterostructure assembly. Nat Electron 6, 947–948 (2023).

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