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Acoustic resonators with a commercial ring

Unreleased acoustic resonators fabricated in commercial fin-field-effect-transistor technology could be used in multigigahertz signal processing.

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Fig. 1: Unreleased CMOS FinFET resonators with phononic acoustic energy confinement.


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Correspondence to Ming-Huang Li.

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The author declares no competing interests.

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Li, MH. Acoustic resonators with a commercial ring. Nat Electron 5, 545–546 (2022).

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