Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

  • News & Views
  • Published:

SIGNAL PROCESSING

Acoustic resonators with a commercial ring

Nature Electronics volume 5, pages 545–546 (2022)Cite this article

Subjects

Unreleased acoustic resonators fabricated in commercial fin-field-effect-transistor technology could be used in multigigahertz signal processing.

This is a preview of subscription content, access via your institution

Access options

Buy this article

  • Purchase on Springer Link
  • Instant access to full article PDF
Buy now

Prices may be subject to local taxes which are calculated during checkout

Fig. 1: Unreleased CMOS FinFET resonators with phononic acoustic energy confinement.

References

  1. Campbell, C. Surface Acoustic Wave Devices for Mobile and Wireless Communications (Academic Press, 1998).

  2. Gong, S. et al. IEEE Microw. 1, 601–609 (2021).

    Article  Google Scholar 

  3. Li, M.-H. et al. J. Microelectromech. Syst. 24, 360–372 (2015).

    Article  Google Scholar 

  4. Dubois, M.-A. et al. IEEE Int. Solid State Circuits Conf. 392–393 (2005).

  5. Anderson, J., He, Y., Bahr, B. & Weinstein, D. Nat. Electron. https://doi.org/10.1038/s41928-022-00827-6 (2022).

    Article  Google Scholar 

  6. Bahr, B. et al. IEEE Int. Solid State Circuits Conf. 348–349 (2018).

  7. Ghatge, M. et al. Nat. Electron. 2, 506–512 (2019).

    Article  Google Scholar 

  8. He, Y. et al. Microsyst. Nanoeng. 6, 8 (2020).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan

    Ming-Huang Li

Authors
  1. Ming-Huang Li
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ming-Huang Li.

Ethics declarations

Competing interests

The author declares no competing interests.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Li, MH. Acoustic resonators with a commercial ring. Nat Electron 5, 545–546 (2022). https://doi.org/10.1038/s41928-022-00837-4

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1038/s41928-022-00837-4

Search

Advanced search

Quick links

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing