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SIGNAL PROCESSING

Acoustic resonators with a commercial ring

Unreleased acoustic resonators fabricated in commercial fin-field-effect-transistor technology could be used in multigigahertz signal processing.

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Fig. 1: Unreleased CMOS FinFET resonators with phononic acoustic energy confinement.

References

  1. Campbell, C. Surface Acoustic Wave Devices for Mobile and Wireless Communications (Academic Press, 1998).

  2. Gong, S. et al. IEEE Microw. 1, 601–609 (2021).

    Article  Google Scholar 

  3. Li, M.-H. et al. J. Microelectromech. Syst. 24, 360–372 (2015).

    Article  Google Scholar 

  4. Dubois, M.-A. et al. IEEE Int. Solid State Circuits Conf. 392–393 (2005).

  5. Anderson, J., He, Y., Bahr, B. & Weinstein, D. Nat. Electron. https://doi.org/10.1038/s41928-022-00827-6 (2022).

    Article  Google Scholar 

  6. Bahr, B. et al. IEEE Int. Solid State Circuits Conf. 348–349 (2018).

  7. Ghatge, M. et al. Nat. Electron. 2, 506–512 (2019).

    Article  Google Scholar 

  8. He, Y. et al. Microsyst. Nanoeng. 6, 8 (2020).

    Article  Google Scholar 

Download references

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Correspondence to Ming-Huang Li.

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Li, MH. Acoustic resonators with a commercial ring. Nat Electron 5, 545–546 (2022). https://doi.org/10.1038/s41928-022-00837-4

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  • DOI: https://doi.org/10.1038/s41928-022-00837-4

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