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Monolayer transistors at wafer scales

Monolayer transition metal dichalcogenide transistors can be fabricated on 300 mm wafers using an approach that is compatible with back-end-of-line process temperatures.

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Fig. 1: 2D monolayer transistors at wafer scales.


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Correspondence to Du Xiang or Tao Liu.

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Xiang, D., Liu, T. Monolayer transistors at wafer scales. Nat Electron 4, 868–869 (2021).

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