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Inorganic molecular crystals for 2D electronics

Inorganic molecular crystal films of antimony trioxide can be grown on 4-inch wafers via a thermal evaporation process and used as a top-gate oxide in two-dimensional molybdenum disulfide transistors.

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Fig. 1: The development of MoS2 FETs with Sb2O3 insulators.


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Correspondence to Yury Yu. Illarionov or Tibor Grasser.

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The authors declare no competing interests.

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Illarionov, Y.Y., Knobloch, T. & Grasser, T. Inorganic molecular crystals for 2D electronics. Nat Electron 4, 870–871 (2021).

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