Magnetic field sensors are important in a variety of applications, including transport and medical devices. However, existing solid-state approaches for the detection of three-dimensional magnetic fields require multiple sensors, making the set-ups bulky. Here, we show that a single spin–orbit torque device composed of a Ta/CoFeB/MgO heterostructure can detect a vector magnetic field. In-plane and out-of-plane field components lead to the displacement of domain walls in the CoFeB layer, modulating the associated anomalous Hall effect resistance. Modulation of the anomalous Hall effect resistance varies linearly with the x, y and z components of a vector magnetic field. Our compact three-dimensional magnetic field sensor exhibits good linearity within a certain range (3.2%, 2.7% and 4.3% for the x, y and z directions, respectively) and high sensitivity (205, 282 and 1,845 V A−1 T−1 for the x, y and z directions, respectively). The sensor also exhibits low 1/f noise.
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This work was supported by the National Natural Science Foundation of China (NSFC grants 62074063, 61821003, 61904051, 61904060, 51671098 and 61674062), the National Key Research and Development Program of China (grant no. 2020AAA0109000), the Research Project of Wuhan Science and Technology Bureau (grant no. 2019010701011394) and the Fundamental Research Funds for the Central Universities (HUST: 2018KFYXKJC019). We acknowledge assistance from G. Wu and L. Zhan in providing the equipment for noise measurements.
The authors declare no competing interests.
Peer review information Nature Electronics thanks Coriolan Tiusan and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
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Li, R., Zhang, S., Luo, S. et al. A spin–orbit torque device for sensing three-dimensional magnetic fields. Nat Electron 4, 179–184 (2021). https://doi.org/10.1038/s41928-021-00542-8