Constructing a computing circuit in three dimensions (3D) is a necessary step to enable the massive connections and efficient communications required in complex neural networks. 3D circuits based on conventional complementary metal–oxide–semiconductor transistors are, however, difficult to build because of challenges involved in growing or stacking multilayer single-crystalline silicon channels. Here we report a 3D circuit composed of eight layers of monolithically integrated memristive devices. The vertically aligned input and output electrodes in our 3D structure make it possible to directly map and implement complex neural networks. As a proof-of-concept demonstration, we programmed parallelly operated kernels into the 3D array, implemented a convolutional neural network and achieved software-comparable accuracy in recognizing handwritten digits from the Modified National Institute of Standard and Technology database. We also demonstrated the edge detection of moving objects in videos by applying groups of Prewitt filters in the 3D array to process pixels in parallel.
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The data that support the plots within this article and other findings of this study are available from the corresponding author upon reasonable request.
The code that support the plots within this article and other findings of this study is available at https://github.com/plin83/NE_3D_CNN. The code that supports the communication between the custom-built measurement system and the integrated chip is available from the corresponding author upon reasonable request.
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This work is partially sponsored by the Air Force Research Laboratory under agreement nos FA8750-15-2-0044 and FA8750-18-2-0122, as well as by the Air Force Office of Scientific Research (AFOSR) under grant FA9550-12-1-0038. Q.X. thanks H. Weinstock of AFOSR for the initial support of this project. The views and conclusions contained herein are those of the authors and should not be interpreted as necessarily representing the official policies or endorsements, either expressed or implied, of the Air Force Research Laboratory or the US Government. This work was performed in part at the Center for Hierarchical Manufacturing (CHM), an NSF-sponsored Nanoscale Science and Engineering Center (NSEC) at the University of Massachusetts, Amherst, and in part at the Center for Nanoscale Systems (CNS), a member of the NSF National Nanotechnology Infrastructure Network (NNIN) at Harvard University (ECS-0335765).
The authors declare no competing interests.
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Lin, P., Li, C., Wang, Z. et al. Three-dimensional memristor circuits as complex neural networks. Nat Electron 3, 225–232 (2020). https://doi.org/10.1038/s41928-020-0397-9
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