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Doping on demand in 2D devices

High-resolution doping patterns can be reversibly written in van der Waals heterostructures using a combination of an electron beam and a back-gate voltage.

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Fig. 1: An electron-beam-induced doping technique for 2D devices.


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Correspondence to Yu Huang.

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Lee, SJ., Lin, Z., Duan, X. et al. Doping on demand in 2D devices. Nat Electron 3, 77–78 (2020).

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