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MEMS research is better together

Nature Electronics volume 2, pages 134–136 (2019)Cite this article

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Open collaboration based on shared facilities can accelerate the commercialization of microelectromechanical systems.

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Fig. 1: Inside the Hands-on-access Fabrication Facility.
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  1. Micro System Integration Center, Tohoku University, Sendai, Japan

    Kentaro Totsu, Masaaki Moriyama & Masayoshi Esashi

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  1. Kentaro Totsu
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  2. Masaaki Moriyama
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  3. Masayoshi Esashi
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Correspondence to Kentaro Totsu.

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Totsu, K., Moriyama, M. & Esashi, M. MEMS research is better together. Nat Electron 2, 134–136 (2019). https://doi.org/10.1038/s41928-019-0236-z

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