News & Views | Published:

SCANNING PROBE LITHOGRAPHY

Nanoscale patterning hots up

Nature Electronicsvolume 2pages1314 (2019) | Download Citation

A nanolithography technique that uses a heated scanning probe tip can precisely pattern metal electrodes on two-dimensional semiconductors, creating field-effect transistors with exceptional performance.

Access optionsAccess options

Rent or Buy article

Get time limited or full article access on ReadCube.

from$8.99

All prices are NET prices.

References

  1. 1.

    Salaita, K., Wang, Y. & Mirkin, C. A. Nat. Nanotech. 2, 145–155 (2007).

  2. 2.

    Zheng, X. et al. Nat. Electron. https://doi.org/10.1038/s41928-018-0191-0 (2019).

  3. 3.

    Allain, A., Kang, J., Banerjee, K. & Kis, A. Nat. Mater. 14, 1195–1205 (2015).

  4. 4.

    English, C. D. et al. Nano Lett. 16, 3824–3830 (2016).

  5. 5.

    Wang, L. et al. Science 342, 614–617 (2013).

  6. 6.

    Kappera, R. et al. Nat. Mater. 13, 1128 (2014).

  7. 7.

    Yu, Y. et al. Nat. Chem. 10, 638–643 (2018).

  8. 8.

    Liu, Y. et al. Nano Lett. 15, 3030–3034 (2015).

  9. 9.

    Cui, X. et al. Nano Lett. 17, 4781–4786 (2017).

  10. 10.

    He, Q. et al. ACS Nano 11, 4381–4386 (2017).

Download references

Author information

Affiliations

  1. Centre for Programmed Materials, School of Materials Science and Engineering, Nanyang Technological University, Singapore, Singapore

    • Qiyuan He
    •  & Hua Zhang

Authors

  1. Search for Qiyuan He in:

  2. Search for Hua Zhang in:

Corresponding author

Correspondence to Hua Zhang.

About this article

Publication history

Published

DOI

https://doi.org/10.1038/s41928-018-0197-7

Newsletter Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing