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Nanoscale patterning hots up

A nanolithography technique that uses a heated scanning probe tip can precisely pattern metal electrodes on two-dimensional semiconductors, creating field-effect transistors with exceptional performance.

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Fig. 1: Fabricating devices with thermal scanning probe lithography.

adapted from ref. 2, Springer Nature Ltd

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Correspondence to Hua Zhang.

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He, Q., Zhang, H. Nanoscale patterning hots up. Nat Electron 2, 13–14 (2019).

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