The compressive buckling of lithographically defined, two-dimensional patterns can create three-dimensional piezoelectric microsystems with a range of potential applications.
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Voss, R. et al. In 9th Int. Conf. Solid-State Sensors Actuators (Transducers '97) 2, 879–882 (1997).
Yu, X. et al. Nat. Biomed. Eng. 2, 165–172 (2018).
Damaraju, S. M. et al. Biomaterials 149, 51–62 (2017).
Yu, Q. et al. AIP Adv. 5, 047144 (2015).
Zhao, N. et al. Rev. Sci. Instrum. 87, 015003 (2016).
Tsukamoto, T., Umino, Y., Shiomi, S., Yamada, K. & Suzuki, T. Sci. Technol. Adv. Mater. 19, 660–668 (2018).
Qi, Y. et al. Nano Lett. 11, 1331–1336 (2011).
Han, M. et al. Nat. Electron. https://doi.org/10.1038/s41928-018-0189-7 (2019).
Rakotondrabe, M., Ivan, I. A., Khadraoui, S., Lutz, P. & Chaillet, N. IEEE/ASME Trans. Mechatronics 20, 519–531 (2015).
Lee, S. et al. Sci. Rep. 8, 301 (2018).
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Haghiashtiani, G., McAlpine, M.C. 3D piezoelectric microsystems pop up. Nat Electron 2, 15–16 (2019). https://doi.org/10.1038/s41928-018-0196-8