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3D piezoelectric microsystems pop up

Nature Electronicsvolume 2pages1516 (2019) | Download Citation

The compressive buckling of lithographically defined, two-dimensional patterns can create three-dimensional piezoelectric microsystems with a range of potential applications.

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Author information

Affiliations

  1. Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN, USA

    • Ghazaleh Haghiashtiani
    •  & Michael C. McAlpine

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Corresponding author

Correspondence to Michael C. McAlpine.

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DOI

https://doi.org/10.1038/s41928-018-0196-8

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