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BLOCK COPOLYMERS

Directed self-assembly for advanced chips

Nature Electronics volume 1, pages 530–531 (2018)Cite this article

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Guided self-assembly of block copolymers can generate the patterns required for the fabrication of advanced integrated circuits.

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Fig. 1: Building FinFET technology using the directed self-assembly of block copolymers.

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  1. Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, TX, USA

    David Z. Pan

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  1. David Z. Pan
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Correspondence to David Z. Pan.

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Pan, D.Z. Directed self-assembly for advanced chips. Nat Electron 1, 530–531 (2018). https://doi.org/10.1038/s41928-018-0152-7

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