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MEMS SENSORS

Distortion-free probes of electric field

Nature Electronicsvolume 1pages1011 (2018) | Download Citation

A microfabricated silicon device can locally measure the intensity of an electric field without any significant field distortion.

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Author information

Affiliations

  1. Department of Information Engineering, University of Brescia, Brescia, Italy

    • Vittorio Ferrari

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Correspondence to Vittorio Ferrari.

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DOI

https://doi.org/10.1038/s41928-017-0013-9

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