Figure 3 | Scientific Reports

Figure 3

From: Towards integrated metatronics: a holistic approach on precise optical and electrical properties of Indium Tin Oxide

Figure 3

Complex refractive index and resisitivity depth profile (ac) Real (left y-axis) and imaginary part (right y-axis) of the refractive index spectral response investigated by ellipsometry. Different curves (red to green) represent different depth profile distribution within the film thickness (red/top layer, green/bottom layer) for 0 (a), 10 (b), 30 (c) sccm after annealing. Bottom row represents the resistivity depth profile along the film thickness. The thickness of the 3 films, (a) 600 nm, (b) 300 nm, (c) 180 nm, on the (x-axis) is normalized for an easy comparison.

Back to article page